透射电子显微镜原位低温高频信号样品杆的研制  

Fabrication of in⁃situ cooling TEM holder withhigh⁃frequency signal

作　　者：裴科 张瑞轩 杨利廷 赵雪冰[2] 车仁超[1,3] PEI Ke;ZHANG Rui-xuan;YANG Li-ting;ZHAO Xue-bing;CHE Ren-chao(Laboratory of Advanced Materials,Shanghai Key Lab of Molecular Catalysis and Innovative Materials,Department of Materials Science,Fudan University,Shanghai 200438;Frontier Institute of Chip and System,Zhangjiang Fudan International Innovation Center,Fudan University,Shanghai 200438;Joint-Research Center for Computational Materials,Zhejiang Laboratory,Hangzhou Zhejiang 311100,China)

机构地区：[1]复旦大学先进材料实验室,上海市分子催化与创新材料重点实验室,工程与应用技术研究院,上海200438 [2]复旦大学,芯片与系统前沿技术研究院,上海200438 [3]之江实验室,计算材料联合研究中心,浙江杭州311100

出　　处：《电子显微学报》2023年第3期325-329,共5页Journal of Chinese Electron Microscopy Society

基　　金：国家重点研发计划(No.2021YFA1200600);国家自然科学基金资助项目(Nos.52231007,51725101,11727807,51672050,61790581,22088101);浙江省实验室基础设施建设项目.

摘　　要：透射电子显微镜原位测试技术是未来电子显微学发展的聚焦方向,尤其是多种原位条件复合的特种样品杆,是目前科学研究急需的重要设备。本文简述了原位低温高频脉冲信号样品杆的设计方案,通过样品杆和芯片设计,实现样品在低温、电流、磁场和高频脉冲信号作用下的原位测试,可以实现100~300 K的连续变温,实现10 MHz~2 GHz高频脉冲信号的通入,可对微纳尺度功能材料在多种物理场作用下的结构与性质变化进行深入的分析。The in-situ technology based on transmission electron microscopy is an important future development of electron microscopy.The multifunctional holder is the urgent equipment for scientific research.In this paper,the design of in-situ cooling TEM holder with high-frequency signal is presented.Through the design of holder and chips,in-situ experiments are realized by coupling the external fields of cooling,magnetic field and high-frequency current signal.The temperature can be modulated from 100 K to 300 K.The high-frequency signal can be tuned from 10 MHz to 2 GHz.The relation between microstructure and property of micro-and nano-scale functional materials can be built under multi-physical fields.

关 键 词：透射电子显微镜 原位样品杆 高频脉冲信号 芯片设计 

分 类 号：TG14[一般工业技术—材料科学与工程] O469[金属学及工艺—金属材料] O59[金属学及工艺—金属学]