多束电子光学系统的研究现状与发展  

The current states and progress of multi⁃beamelectron optical systems

作　　者：张利新 赵伟霞[1] 陈代谢 张雨露 刘俊标[1,2] 韩立 ZHANG Li-xin;ZHAO Wei-xia;CHEN Dai-xie;ZHANG Yu-lu;LIU Jun-biao;HAN Li(Research Department of Micro-Nano Fabrication Technology and Intelligent Electronic Devices,Institute of Electrical Engineering Chinese Academy of Sciences,Beijing 100190;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049;Bureau of Facility Support and Budget,Chinese Academy of Sciences,Beijing 100864,China)

机构地区：[1]中国科学院电工研究所,微纳加工技术与智能电气设备研究部,北京100190 [2]中国科学院大学,电子电气与通信工程学院,北京100049 [3]中国科学院条件保障与财务局,北京100864

出　　处：《电子显微学报》2023年第3期376-385,共10页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金青年基金项目(No.62101528);中国科学院科研仪器设备研制项目(No.GJJSTD20200003);中国科学院特别研究助理资助项目.

摘　　要：本文对多束电子光学系统的国内外研究现状进行了详细调研,总结了各个系统的特点以及应用领域。多束电子光学系统在生命科学领域、材料领域以及半导体领域具有广泛的应用价值,本文指出了我国需要开展这方面研究的必要性。同时,本文介绍了国内在多束电子光学领域的研究进展。In this paper,the research status of multi-beam electron optical systems at home and abroad was investigated in detail,and the characteristics and application fields of each system were summarized.Multi-beam electron optical systems are widely used in the fields of life science,materials and semiconductors etc.Therefore,it is necessary to conduct the related research in this field.At the same time,the domestic research progress in the field of multi-beam electron optics was introduced.

关 键 词：电子光学 多束电子光学 高通量 扫描电子显微镜 

分 类 号：TN14[电子电信—物理电子学] TN16[机械工程—光学工程] O463[理学—电子物理学]