G-M制冷机低温泵减振设计和抽氢性能研究  

Anti-vibration design and hydrogen absorption property of G-M refrigerator cryopump

作　　者：曾环 杨杨 武义锋[1,2] 邓家良 Zeng Huan;Yang Yang;Wu Yifeng;Deng Jialiang(The 16th Institute of Electronics Technology Group Corporation,Hefei 230088,China;Anhui Vacree Technologies Co.Ltd.,Hefei 230088,China)

机构地区：[1]中国电子科技集团第十六研究所,合肥230088 [2]安徽万瑞冷电科技有限公司,合肥230088

出　　处：《低温与超导》2023年第5期78-84,共7页Cryogenics and Superconductivity

基　　金：国家科技重大专项(2014ZX02001)资助。

摘　　要：本文详细介绍了G-M型制冷机低温泵冷屏和障板的热力学仿真、低温泵减振设计和抽氢性能研究。G-M型制冷机低温泵开机降温,完成减振低温泵振幅测试和抽氢性能试验。减振低温泵的泵口振幅降至±0.096μm,低温泵实际抽氢速率优于14000 L/s,与设计相符,满足客户使用需求。In this paper,the thermodynamic simulation of the cold shield and baffle,the vibration reduction design and the hydrogen extraction performance of the cryopump of G-M refrigerator were introduced in detail.The cryopump experiments were conducted on its start up,cooling down,anti-vibration design and the hydrogen extraction performance.The vibration amplitude for the cryopump nozzle is reduced to±0.096μm,the actual hydrogen pumping speed is better than 14000 L/s,which can be consistent with the design and meet the needs of customers.

关 键 词：G-M型制冷机 低温泵 热力学仿真 减振设计 抽氢性能 

分 类 号：TB752.53[一般工业技术—真空技术]