矩形水冷压电变形镜的制备与表征  

Fabrication and characterization of rectangular water cooling piezoelectric deformable mirror

作　　者：姚琪 罗帆 俞历程 马剑强[1] YAO Qi;LUO Fan;YU Licheng;MA Jianqiang(Faculty of Mechanical Engineering&Mechanics,Ningbo University,Ningbo 315211,China)

机构地区：[1]宁波大学机械工程与力学学院,浙江宁波315211

出　　处：《宁波大学学报（理工版）》2023年第4期14-18,共5页Journal of Ningbo University：Natural Science and Engineering Edition

基　　金：国家自然科学基金(51805280)

摘　　要：针对板条激光器射出激光束畸变问题,提出了一种边缘驱动的矩形水冷压电变形镜.首先建立有限元模型对变形镜校正性能和热性能进行仿真,结果显示在功率为10kW的激光照射下加载冷却条件,变形镜镜面温度降至45℃,冷却效果显著;然后通过实验成功制备了60单元20 mm×4mm口径的变形镜样机,搭建了基于Shack-Hartman传感器的自适应光学测试系统,并对变形镜典型致动器影响函数、校正性能、频率响应特性进行了表征.测试结果显示:变形镜典型致动器在100V电压驱动下的变形量为1.0~1.5μm,能够较准确重构低阶正弦函数面形,一阶固有频率约为650Hz.该矩形水冷压电变形镜具备一定的校正能力,在低成本板条激光器校正领域具有一定的应用前景.In order to solve the problem of laser beam distortion,a rectangular water cooling piezoelectric deformable mirror driven by an edge is proposed.The finite element model is established to simulate the correction performance and thermal performance of the deformable mirror.The simulation results show that the cooling effect is remarkable when the temperature of the deformable mirror drops to 45℃under the cooling condition of the laser irradiation with the power of 10 kW.A prototype of a 60-unit 20 mm×4 mm deformable mirror is successfully prepared in the experiment,and an adaptive optical test system based on Shack-Hartman sensor is built,the typical actuator influence function,correction performance and frequency response characteristics of the deformable mirror are characterized.The experimental results show that the typical actuator deformations are about 1.0-1.5μm under 100 V,and can reconstruct the surface shape of low-order sine function accurately,and the first-order natural frequency is about 650 Hz.The rectangular water cooling piezoelectric deformable mirror has a certain ability to correct,and has a certain application prospect in the field of low cost strip laser correction.

关 键 词：自适应光学 水冷 压电变形镜 板条激光器 

分 类 号：TN384[电子电信—物理电子学] O438[机械工程—光学工程]