静态千级车间洁净室气流组织数值模拟  

Numerical Simulation of Airflow Organization of Clean Room in Static Class Thousand Workshop

作　　者：张泽超 林鑫 贾云鹏 Zhang Zechao;Lin Xin;Jia Yunpeng

机构地区：[1]山东建筑大学热能工程学院 [2]中建八局第四建设有限公司

出　　处：《洁净与空调技术》2023年第2期21-24,共4页Contamination Control & Air-Conditioning Technology

摘　　要：随着电子芯片行业的高速发展,生产车间洁净室的气流组织优劣得到了广泛的关注,良好的气流组织可以提高产品的质量与成品率。对青岛市某洁净等级为ISO 6级的厂房洁净室气流组织进行了数值模拟,得到了厂房内的温度分布、气流分布及空气龄状况。结果表明该厂房洁净室内气流组织状况良好,温度分布较为均匀,人员工作区的通风换气状况满足需求,数值模拟结果可为单向流洁净室结果分析提供一定的参考。With the rapid development of the electronic chip industry,the airflow organization of the clean room in the production plant has been widely concerned,and good airflow organization can improve the quality and yield of the products.In this paper,numerical simulation of the airflow organization of a clean room in a plant with ISO 6 clean class in Qingdao was carried out,and the temperature distribution,airflow distribution and air age conditions in the plant were obtained.The results show that the airflow organization in the clean room of the plant is good,the temperature distribution is relatively uniform,the ventilation of the personnel working area meets the demand,and the numerical simulation results can provide some reference for the analysis of the results of the unidirectional flow clean room.

关 键 词：洁净室 数值模拟 气流组织 HY-CFD 

分 类 号：TU834.31[建筑科学—供热、供燃气、通风及空调工程]