太赫兹时域光谱技术在涂层检测中的研究进展  

Research Progress of Terahertz Time-Domain Spectroscopy Technology in Coating Detection

作　　者：万玉红[1] 董形影 吴育衡 刘增华[2] WAN Yuhong;DONG Xingying;WU Yuheng;LIU Zenghua(Faculty of Science,Beijing University of Technology,Beijing 100124,China;Faculty of Materials and Manufacturing,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学理学部,北京100124 [2]北京工业大学材料与制造学部,北京100124

出　　处：《测控技术》2023年第6期22-35,共14页Measurement & Control Technology

基　　金：北京市自然科学基金项目(3222001)。

摘　　要：涂层结构具有美观、隔热和耐腐蚀等优点,被广泛应用于航空航天、汽车船舶制造和制药等领域。但在涂层制备和服役过程中会不可避免地出现气泡和裂纹等缺陷,且涂层厚度和均匀性会直接影响涂层寿命,因此对涂层结构的检测显得十分重要。与常规无损检测技术相比,太赫兹时域光谱(THz-TDS)技术非接触性好、抗干扰性强,适用于涂层结构快速无损检测。首先,简要地介绍了太赫兹波、太赫兹时域光谱技术和典型的太赫兹时域光谱系统;然后,详细地阐述了太赫兹时域光谱技术在光学参量、厚度和微结构检测方面的国内外研究进展,特别是太赫兹波在汽车船舶、航空航天和生物制药方向的厚度检测与成像;最后,分析了涂层结构无损检测的现状,对现有的太赫兹波检测涂层存在的问题进行了总结,并对其未来的发展进行了讨论和展望。Coating structure is widely used in aerospace,automotive,shipbuilding,pharmaceutical and other fields due to its advantages of beautiful appearance,heat insulation and corrosion resistance.However,bubbles and cracks will inevitably appear in the process of coating preparation and service,and coating thickness and uniformity will directly affect the coating life,so it is vitally important to detect the coating structure.Compared with conventional nondestructive testing technology,the terahertz time-domain spectroscopy(THz-TDS)tech-nology has good non-contact and strong anti-interference,and is suitable for rapid nondestructive testing(NDT)of coating structure.Firstly,the THz wave,THz-TDS technology and typical THz-TDS systems are briefly intro-duced.Then,the research progress of THz-TDS in optical parameters,thickness and microstructure detection at home and abroad is described in detail,especially the thickness detection and imaging in automotive,ship-building,aerospace and biopharmaceutical.Finally,the status quo of nondestructive testing of coating structure is analyzed,the existing problems of THz wave testing coating are summarized,and its future development is discussed and prospected.

关 键 词：涂层 太赫兹时域光谱技术 无损检测 厚度 微结构 

分 类 号：TG174.44[金属学及工艺—金属表面处理] O433[金属学及工艺—金属学] TP391.41[机械工程—光学工程]