基于递归正位置反馈的三阶压电纳米定位台谐振控制  

Resonant Control of Third-Order Piezoelectric Nano-Positioning Stage Based on Recursive Positive Position Feedback

作　　者：吴智仁 许素安 富雅琼 武泽宇 WU Zhiren;XU Su’an;FU Yaqiong;WU Zeyu(College of Mechanical and Electrical Engineering,China Jiliang University,Hangzhou Zhejiang 310018,China)

机构地区：[1]中国计量大学机电工程学院,浙江杭州310018

出　　处：《传感技术学报》2023年第5期738-743,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51105348)。

摘　　要：针对压电纳米定位台的低阻尼谐振振动,设计了一种基于递归结构的正位置反馈控制器(RPPF)的闭环控制方法。利用激励信号输入平台进行系统辨识并使用零极点对消方法简化三阶系统,对闭环特征方程使用费拉里法求解。针对控制器参数较多,极点配置不够准确等问题,利用飞蛾扑火算法对RPPF控制器进行参数配置。实验结果表明,与正位置反馈控制器(PPF)相比,递归正位置反馈控制器(RPPF)将三阶压电纳米定位台的闭环带宽从531 Hz提升到663 Hz,且50 Hz三角跟踪的最大绝对误差和均方根误差分别降低了30.12%和26.47%,具有更好的跟踪速度和精度。A closed-loop control method based on recursive structured positive position feedback controller(RPPF)is designed for the low damped resonance vibration of the piezoelectric nanopositioning stage.The excitation signal input stage is used to identify the system,the zero-pole cancellation method is used to simplify the third-order system,and the closed-loop characteristic equation is solved by using the Ferrari method.Aiming at the problems that the controller has many parameters and the pole configuration is not accurate enough,the moth-flame optimization algorithm is used to configure the parameters of the RPPF controller.The experimental results show that,compared with the positive position feedback controller(PPF),the recursive positive position feedback controller(RPPF)improves the closed-loop bandwidth of the third-order piezoelectric nanopositioning stage from 531 Hz to 663 Hz,and the maximum absolute error and root mean square error of 50 Hz triangular tracking are reduced by 30.12%and 26.47%,respectively,demonstrating better tracking speed and accuracy.

关 键 词：压电纳米定位台 低阻尼谐振模态抑制 极点配置法 递归结构 主动阻尼控制器 

分 类 号：TP273.3[自动化与计算机技术—检测技术与自动化装置]