基于能带结构特性Si/ZnO多层膜的设计与制备  

Design and Fabrication of Si/ZnO Multilayer Films Based on Energy Band Structure Characteristics

作　　者：李嘉威 李享成[1] 陈平安[1] 朱颖丽 朱伯铨[1] Li Jiawei;Li Xiangcheng;Chen Ping′an;Zhu Yingli;Zhu Boquan(The State Key Laboratory of Refractories and Metallurgy,Wuhan University of Science and Technology,Wuhan 430081,Hubei,China)

机构地区：[1]武汉科技大学省部共建耐火材料与冶金国家重点实验室,湖北武汉430081

出　　处：《光学学报》2023年第9期286-293,共8页Acta Optica Sinica

基　　金：国家自然科学基金(51972242,51774218);湖北省自然科学基金创新群体项目(2020CFA038);湖北省重点研发计划(2020BAA028)。

摘　　要：基于能带理论设计了一种用于红外高反射的新型一维光子晶体。根据麦克斯韦方程的传输矩阵计算基础,得到了布洛赫波与入射光频率的色散关系,并由此构建了光子晶体能带结构。入射光波在介电常数周期变化结构中的布里渊区边界多次反射后会形成驻波,从而产生光子禁带。叠加3~5μm和8~12μm两种周期结构的光子晶体可以使光子禁带拓宽2.2×10^(13) Hz。在此基础上,选用折射率色散小的材料体系Si/ZnO设计并制备了13层一维光子晶体,该晶体在3~5μm和8~12μm红外波段的平均反射率在91.3%以上。实验结果与仿真结果吻合,验证了模型和理论的高可靠性。Objective Infrared high reflective materials are widely employed to reduce surface emissivity.According to Kirchhoff's law,increasing the reflectivity of a material in the atmospheric window of mid-and far-infrared wavelengths can reduce the thermal radiation intensity of an object,thus decreasing the radiation difference between this object and surrounding environments.As a periodic structured functional material,photonic crystal(PC)has been extensively studied due to its extremely high infrared reflectivity and spectral compatibility.Various schemes have been designed in terms of PC film thickness and periodic structure to improve its forbidden band width and reflectance.However,there is a challenge to designing one-dimensional PCs for achieving the infrared high reflectance in 3-5μm and 8-14μm while minimizing the number of layers as much as possible.Therefore,this paper hopes to broaden the photonic forbidden band by constructing PC energy bands and adopting new material systems.Methods Due to the action of the periodic potential field in semiconductor materials,electrons will form band structure and energy gaps exist between bands.However,photons in the periodic arrangement of dielectric materials will change their propagation properties and form a similar band structure.Based on Maxwell's equation,the propagation characteristics of electromagnetic waves in one-dimensional PCs are equivalent to superposition in multiple monolayer media.Since the wave vector k outside the Brillouin region is repeated,when the light wave reaches the boundary of the region,it is reflected back to the Brillouin region.After repeated reflections,a standing wave is formed,which constitutes the photonic band gap region.The upper and lower frequency regions are completely separated by the standing wave to form a photonic band gap.The light waves in the band gap cannot propagate,so the band gap in PC means high reflectance.Based on this,the transmission matrix of light waves is derived,and the PC band structure and band gap reflect

关 键 词：薄膜 低层数光子晶体 传输矩阵 布里渊区边界 禁带宽度调控 红外高反射 

分 类 号：TN213[电子电信—物理电子学]