基于码道三角波骨架提取的量子点光栅尺高精度测量方法  

High-precision Measurement for a Quantum Dot Encoder Based on Triangular-wave Skeleton Extraction of Coding Patterns

作　　者：吴志良 蔡念[1] 欧伟程 陈晓娜 王晗[2] WU Zhiliang;CAI Nian;OU Weicheng;CHEN Xiaona;WANG Han(School of Information Engineering,Guangdong University of Technology,Guangzhou 510006,China;School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学信息工程学院,广州510006 [2]广东工业大学机电工程学院,广州510006

出　　处：《光子学报》2023年第6期261-272,共12页Acta Photonica Sinica

基　　金：国家自然科学基金(No.62171142);广东省自然科学基金(No.2021A1515011908);惠州市高校科研专项资金项目(No.2019HZKY003)。

摘　　要：为了提高量子点光栅尺的测量精度,提出了一种基于码道三角波骨架提取的位移测量方法。根据量子点光栅尺码道图案具有蜿蜒、连续的形状特点,利用不定长边缘跟踪方法快速检测出码道边缘。对码道中线进行三角波拟合得到码道骨架,提升测量稳定性以及位移值细分线性度。利用径向基神经网络对非线性测量误差进行补偿。所提出的测量方法比已有测量方法具有更好的测量精度和效率。The laser interferometer and the optical encoder are commonly used for high-precision displacement measurement,which is significant for equipment manufacturing.The former can realize sub-micron measurement by counting and subdividing interference fringes.However,it has the disadvantages of strict requirements for the measurement environment and difficult integration directly into the equipment,which greatly limit its applications in industrial measurement and control.Compared with the laser interferometer,the encoder has been widely integrated with the CNC machine as a core measurement component due to its advantages of low cost,small size,and simple optical structure.Grating lithography has been successfully employed to fabricate the gratings of optical encoders.However,some inherent problems exist in this fabricating process,such as low production,long production cycle,and harsh production conditions.Furthermore,the optical encoder manufactured by the grating lithography requires a combination of a light source and a reading head.When the encoder has worked for a long period of time,the light source will dissipate a large amount of heat,resulting in a drastic change in the internal temperature of the encoder.The drastic temperature change will cause the thermal deformation error of the encoder substrate to influence its measurement precision.Due to the advantages of high efficiency,low cost,and simple process requirements,we have introduced additive manufacturing with perovskite quantum dots to fabricate a novel linear encoder named quantum dot encoder,which prints the perovskite quantum dot coding patterns on the substrate via additive manufacturing.Then,machine vision is applied to process the continuous,regular and winding quantum dot code pattern in real time to achieve displacement measurement.As a novel linear encoder,its measurement precision is significant for its wide applications.In order to further improve the measurement precision of the quantum dot encoder,a displacement measurement method based on

关 键 词：机器视觉 量子点光栅尺 测量 边缘跟踪 骨架提取 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]