飞秒激光烧蚀面齿轮材料的工艺参数影响研究  

Study of Influence of Process Parameters on Femtosecond Laser Ablation of Face Gear Materials

作　　者：明兴祖 赖名涛[2] 袁磊 刘克非 周贤 明瑞 Ming Xingzu;Lai Mingtao;Yuan Lei;Liu Kefei;Zhou Xian;Ming Rui(School of Mechanical Engineering,Hubei University of Arts and Science,Xiangyang 441053,Hubei,China;School of Mechanical Engineering,Hunan University of Technology,Zhuzhou 412007,Hunan,China)

机构地区：[1]湖北文理学院机械工程学院,湖北襄阳441053 [2]湖南工业大学机械工程学院,湖南株洲412007

出　　处：《激光与光电子学进展》2023年第9期311-321,共11页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(51975192);湖南省自然科学基金(2021JJ30214,2021JJ50042);“机电汽车”湖北省优势特色学科群开放基金(XKQ2021044,XKQ2021050);湖北省高等学校优秀中青年科技创新团队(T201919)。

摘　　要：根据面齿轮材料18Cr2Ni4WA的飞秒激光扫描加工中的温度传递过程,建立了三温传热模型,并建立了扫描加工中的多脉冲能量累积模型。仿真分析了改变激光能量密度对烧蚀材料时电子晶格温度的变化,多脉冲加载下电子、晶格和材料表面最高温度的变化,以及改变扫描速度和扫描间距对加载能量的变化,结果表明随着能量密度的增大,电子最高温度从37000 K上升至44000 K、最终平衡温度从17000 K上升至22000 K。在多脉冲的加载下,随着能量密度的增大,电子最高温度也有一定程度的增大,并且材料表面最高温度的平衡温度也会增大,从2600 K上升至3250 K。随着扫描速度和扫描间距的增大,多脉冲累积能量有一定的减小,能量分布尺度在增大。试验分析了不同能量密度、扫描速度和扫描间距对飞秒激光烧蚀面齿轮材料的影响,并对烧蚀形貌进行了粗糙度分析,结果表明,当能量密度为4.34 J/cm^(2)、扫描速度为300 mm/s、扫描间距为18μm时,烧蚀形貌质量较好。该研究为提高飞秒激光扫描加工面齿轮材料的表面形貌质量提供了研究基础。In this paper,a threetemperature heat transfer model was developed based on the temperature transfer process in the femtosecond laser scanning processing of the face gear material 18Cr2Ni4WA,and a multipulse energy accumulation model in the scanning process was established.The simulation analyzed the changes of electron lattice temperature when changing the laser energy density on the ablated material,the changes of maximum temperature of electron,lattice and material surface under multipulse loading,and the changes of loading energy when changing the scanning speed and scanning interval,and concluded that with the increase of energy density,the maximum temperature of electron increased from 37000 K to 44000 K,and the final equilibrium temperature increased from 17000 K to 22000 K.Under multipulse loading,with the increase of energy density,the maximum temperature of electrons also increases to a certain extent,and the equilibrium temperature of the highest temperature of the material surface also increases,from 2600 K to 3250 K.With the increase of scanning speed and scanning interval,the accumulated energy of multipulse has a certain decrease,and the energy distribution scale is increasing.The experiments analyzed the effects of different energy densities,scanning speeds,and scanning intervals on the femtosecond laser ablated surface gear material,and the roughness analysis of the ablated morphology was carried out,and it was concluded that the quality of the ablated morphology was better when the energy density was 4.34 J/cm^(2),the scanning speed was 300 mm/s,and the scanning interval was 18μm.These provide a research basis for improving the surface morphology quality of the surface gear materials processed by femtosecond laser scanning.

关 键 词：激光光学 飞秒激光 三温传热模型 扫描速度 能量累积效应 扫描间距 

分 类 号：TN24[电子电信—物理电子学]