基于光学偏折的微小透镜双曲面同步测量  

Double-Surface Simultaneous Measurement of Micro-Lenses Based on Deflectometry

作　　者：阮旸 孔明 窦进超 禹静 华杭波 王狮凌 刘维 Ruan Yang;Kong Ming;Dou Jinchao;Yu Jing;Hua Hangbo;Wang Shiling;Liu Wei(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,Zhejiang,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018

出　　处：《光学学报》2023年第10期135-143,共9页Acta Optica Sinica

摘　　要：针对自由曲面微小透镜检测中无法同时高精度检测前后表面的问题,提出一种基于光学偏折的微小透镜前后曲面同步测量方法。该方法基于高精度的透射波前检测系统建立理想光线追迹模型,并在利用光学偏折高精度测得的含有被测微小透镜面形信息的透射波前像差基础上,以被测微小透镜的前后两个曲面为优化变量,进行数值迭代优化求解,最终基于优化结果重构出被测微小透镜各表面面形误差。对所提出的面形测量方法进行仿真与实验验证,并通过Zygo干涉仪进行比对实验,结果显示对于口径为6 mm的微小透镜,所提方法的检测结果与比对实验的检测结果高度一致,面形偏差的均方根误差值仅为几十纳米。Objective As optical systems become increasingly complex,miniaturized,and integrated,complex surface micro-lenses have been widely used in lighting,imaging,and other fields.Freeform micro-lens measurement is beneficial to the evaluation and processing of high-precision micro-lenses.However,the micro-lens has front and rear surfaces,and the large dynamic range characteristics of the surfaces and the requirement for high-precision inspection limit the versatility and efficiency of the existing micro-lens measurement techniques.Since the two surfaces of the micro-lens on freeform surfaces fail to be simultaneously measured with high accuracy during the detection,we propose a method based on deflectometry to solve the above problem.Methods In order to address the problem that the front and rear surfaces of the micro-lens cannot be measured simultaneously with high accuracy,a numerical iterative optimization algorithm for the simultaneous double-surface reconstruction of the micro-lens based on the high-precision transmission wavefront by deflectometry has been proposed.First,it is necessary to obtain the high-precision transmission wavefront aberration of the micro-lens to get the correspondence between the transmission aberration and the front and rear surfaces of the micro-lens under test.Then,wavefront aberrations with micro-lens surface information are obtained by tracing the ideal model of the measurement system through ray.After that,with the minimum wavefront aberration as the objective function,the numerical iterative optimization is performed with the two surfaces to be measured as the optimization variables to achieve the high-precision simultaneous reconstruction of the front and rear surfaces of the micro-lens.In addition,in order to solve the problem that the front and rear surfaces affect each other during the solution process,the error of each surface of the micro-lens under test is measured by changing the position of the tested element in the experiment and measuring the same tested element several t

关 键 词：测量 透射元件 自由曲面面形检测 光学偏折技术 微小透镜 

分 类 号：TH742[机械工程—光学工程]