外差干涉相位测量中信号串扰误差与补偿方法研究  

Study on Signal Crosstalk Error and its Compensation Method in Phase Measurement for Heterodyne Interferometry

作　　者：杨伟雷 刘洋[2] 赫明钊[2] 缪东晶[2] 陈本永[1] 谢志奇 李建双[2] Yang Weilei;Liu Yang;He Mingzhao;Miao Dongjing;Chen Benyong;Xie Zhiqi;Li Jianshuang(Laboratory of Nanometer Measurement Technology,Zhejiang Sci-Tech University,Hangzhou 310018,Zhejiang,China;National Institute of Metrology,Beijing 100029,China;College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou 310018,Zhejiang,China)

机构地区：[1]浙江理工大学纳米测量技术实验室,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]中国计量大学计量测试工程学院,浙江杭州310018

出　　处：《中国激光》2023年第10期75-86,共12页Chinese Journal of Lasers

基　　金：国家重点研发计划(2019YFB2006103);中国计量科学研究院基本科研业务费项目(AKY1902,AKYZZ2103,AKYZD2212)。

摘　　要：为了解决外差干涉相位测量中多通道采样信号间的串扰误差对相位测量精度的影响,提出了一种基于采样信号频谱分析的预补偿方法来实现信号串扰误差的补偿和消除。首先建立基于锁相放大的正交鉴相法的信号串扰误差理论模型,阐明了串扰系数、输入信号幅值比和串扰信号相位偏移对相位测量误差的影响;设计仿真实验验证了该误差模型和补偿方法的有效性;然后基于紧凑型FPGA开发平台设计了相位测量实验,结果表明该补偿方法能够有效消除信号串扰误差的影响,补偿后相位测量的最大误差从0.34°下降到0.01°;最后搭建了外差干涉仪并与高精度的压电位移平台进行比对,实验结果表明补偿后的信号处理系统能够满足外差干涉测量的应用需求。Objective Heterodyne laser interferometers have been widely utilized in the field of precision measurement owing to their wide measurement range,high measurement accuracy,and robust measurement ability.With the development of high-precision science and technology,higher requirements have been proposed for the measurement accuracy of heterodyne laser interferometers,which is significantly affected by the phase measurement accuracy of the interference signal.In multichannel signal acquisition and processing,the crosstalk error between sampled signals is a familiar error source.In this study,the problem of signal crosstalk in interference signal processing is investigated,and a signal crosstalk error model is established.Accordingly,a pre-compensation method based on spectrum analysis is proposed to eliminate signal crosstalk errors and improve the phase measurement accuracy of the interference signal.Methods The signal crosstalk error was systematically examined through theoretical derivation,simulation analysis,and experimental verification to solve the problem of crosstalk between two sampled signals in heterodyne interferometry.First,a mathematical model of the signal crosstalk error was deduced,and a pre-compensation method based on spectrum analysis was proposed.Then,the influence of the crosstalk coefficient,signal amplitude ratio,and crosstalk signal phase offset on the signal crosstalk error was analyzed via simulation,and the crosstalk compensation method was verified.After the initial verification of the error model and compensation method through simulation,the signal processing algorithm was implemented based on the Red Pitaya FPGA board,and further verification was performed through a phase measurement experiment.The experimental results show that the actual measurement error is consistent with the theoretical calculation error and that the crosstalk compensation method can effectively eliminate the signal crosstalk error.Finally,a heterodyne interferometric measurement system was built to verify that

关 键 词：测量 外差干涉 正交鉴相 信号串扰 频谱分析 位移测量 

分 类 号：TH741[机械工程—光学工程]