基于Fabry-Perot腔的光学真空测量技术研究  

Research on Optical Vacuum Measurement Technology Based on Fabry-Perot Cavity

作　　者：范栋 李得天 习振华[2] 刘坤[1] FAN Dong;LI De-tian;XI Zhen-hua;LIU Kun(School of Mechanical Engineering&Automation,Northeastern University,Shenyang 110819,China;Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]东北大学机械工程与自动化学院,辽宁沈阳110819 [2]兰州空间技术物理研究所真空技术与物理重点实验室,甘肃兰州730000

出　　处：《东北大学学报（自然科学版）》2023年第7期989-995,共7页Journal of Northeastern University(Natural Science)

基　　金：国家自然科学基金资助项目(62071209).

摘　　要：基于从头计算理论,对氩气摩尔极化率、摩尔磁化率和维里系数等物理参数进行计算,结合维里状态方程和Lorentz-Lorenz方程建立了气体压力关于折射率的理论参数模型.利用基于Fabry-Perot腔的光学真空测量装置,通过精确测量Fabry-Perot腔内激光的谐振频率变化,获得气体折射率和气体压力,在10^(5) Pa时,折射率相对测量不确定度为1.8×10^(-11),气体压力相对不确定度为4.4×10^(-6).对比分析基于Fabry-Perot腔的光学真空测量装置与电容薄膜真空计获得的测量压力,结果表明基于Fabry-Perot腔的光学真空测量方法具有较高的稳定性和准确性.Based on the ab initio theory,the physical parameters such as molar polarization,molar susceptibility and Virial coefficient of argon gas were calculated,and the theoretical parameter model of gas pressure about refractive index was established by combining the Virial equation of state and Lorentz-Lorenz equation.The optical vacuum measuring device based on the Fabry-Perot cavity was used to accurately measure the resonant frequency change of the laser in the Fabry-Perot cavity to obtain the gas refractive index and gas pressure.At 10^(5) Pa,the relative uncertainty of the refractive index is 1.8×10^(-11),and the relative uncertainty of the gas pressure is 4.4×10^(-6).The measured pressures obtained by the optical vacuum measuring device based on the Fabry-Perot cavity and the capacitance film vacuum gauge were compared and analyzed.The results showed that the Fabry-Perot cavity based optical vacuum measuring method has higher stability and accuracy.

关 键 词：真空测量 量子化 Fabry-Perot腔 气体折射率 不确定度 

分 类 号：TB935[一般工业技术—计量学]