磁控溅射Ti-Al-N复合膜的摩擦磨损性能分析  

Tribological properties of Ti-Al-N composite films prepared by magnetron sputtering

作　　者：陆昆[1] 杨海 LU Kun;YANG Hai(Medicine College,Chuzhou City Vocational College,Chuzhou,Anhui 239000,China)

机构地区：[1]滁州城市职业学院医学院,安徽滁州239000

出　　处：《宁德师范学院学报（自然科学版）》2023年第2期138-142,共5页Journal of Ningde Normal University(Natural Science)

基　　金：安徽省教育厅自然科学重点项目(KJ2020A1004);安徽省省级质量工程一般项目(2019jyxm0642)。

摘　　要：采用真空磁控溅射技术的方法制备了不同Al质量分数的Ti-Al-N薄膜,分别研究了室温及高温下不同Al质量分数的Ti-Al-N薄膜的摩擦磨损性能.研究结果表明,Al质量分数和温度都对薄膜的摩擦磨损性能产生较大的影响.室温时,当Al质量分数为49.97%时,薄膜的平均摩擦系数最小,为0.772 3;高温条件下,薄膜的摩擦系数显著低于室温条件下,当Al质量分数为39.51%时,平均摩擦系数最小,为0.379 2.Ti-Al-N films with different Al mass fraction were prepared by vacuum magnetron sputtering.The friction and wear properties of Ti-Al-N films with different Al mass fraction at room temperature and high temperature were studied respectively.The results show that Al mass fraction and temperature have a great influence on the friction and wear properties of the films.At room temperature,when the Al mass fraction is 49.97%,the average friction coefficient of the film is the lowest,which is 0.7723.At high temperature,the friction coefficient of the film is significantly lower than that at room temperature.It is found that when the Al mass fraction is 39.51%,the average friction coefficient is the lowest,which is 0.3792.

关 键 词：Ti-Al-N薄膜 真空磁控溅射技术 摩擦磨损 AL原子 摩擦系数 

分 类 号：TG174.44[金属学及工艺—金属表面处理]