A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas  

作　　者：赵明亮 张钰如 高飞 王友年 Mingliang ZHAO;Yuru ZHANG;Fei GAO;Younian WANG(Key Laboratory of Materials Modification by Laser,Ion,and Electron Beams(Ministry of Education),School of Physics,Dalian University of Technology,Dalian 116024,People’s Republic of China)

机构地区：[1]Key Laboratory of Materials Modification by Laser,Ion,and Electron Beams(Ministry of Education),School of Physics,Dalian University of Technology,Dalian 116024,People’s Republic of China

出　　处：《Plasma Science and Technology》2023年第7期61-71,共11页等离子体科学和技术（英文版）

基　　金：financially supported by National Natural Science Foundation of China(Nos.11935005 and 11875101);the Fundamental Research Funds for the Central Universities(No.DUT21LAB110)。

摘　　要：In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.

关 键 词：biased inductively coupled plasma 2D hybrid model IEADs 

分 类 号：O53[理学—等离子体物理]