准确检测液相中氢气浓度的倾斜光纤光栅传感器  

A Tilted Fiber Grating Sensor for Accurate Detection of H 2 Concentration in Liquid Phase

作　　者：王蓉[1,2] 马永军[1] 钟用[2] 王玺苏 王建旭 赵明富 WANG Rong;MA Yongjun;ZHONG Yong;WANG Xisu;WANG Jianxu;ZHAO Mingfu(School of Electrical Engineering,Jiujiang Polytechnic,Jiujiang 330007,China;Chongqing Key Lab.of Optical Fiber Sensor and Photoelectric Detection,Chongqing Engineering Research Center of Intelligent Optical Fiber Sensing Technology,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]九江职业技术学院电气工程学院,江西九江330007 [2]重庆理工大学光纤传感与光电检测重庆市重点实验室,智能光纤感知技术重庆市高校工程研究中心,重庆400054

出　　处：《压电与声光》2023年第3期450-453,459,共5页Piezoelectrics & Acoustooptics

基　　金：江西省科学技术基金资助项目(GJJ191280);江西省教学改革基金重点资助项目(JXJG-19-49-5);重庆市高校创新研究群体项目(CXQT21035);国家自然科学基金面上项目(52176178)。

摘　　要：为了实现液相中氢气体积分数的准确检测,该文利用钯、氧化硅超疏水溶胶和倾斜光纤光栅制备了氢气传感器。首先,在倾斜光纤光栅表面采用磁控溅射法涂覆了一层致密的钯膜,用于响应氢气体积分数变化信息;然后,采用镀膜提拉法在钯膜表面涂覆一层氧化硅超疏水膜,用于阻止水分子进入钯膜内部,导致钯膜从光纤表面脱落,进而增强了传感器在液相环境下运行的稳定性。实验研究了钯膜厚度对传感器氢敏响应特性的影响,并利用传感器对液相中的氢气体积分数进行了检测。研究结果表明,传感器能准确响应液相中氢气体积分数的变化信息,当钯膜厚度为120 nm时,灵敏度达到-15.29 pm/%,最大相对误差为8.67%。To accurately detect the H 2 concentration in liquid phase,a H 2 sensor was fabricated using palladium,silica superhydrophobic sol and tilted fiber grating.First,to respond the hydrogen concentration,a layer of dense Pd film was coated on the surface of the tilted fiber grating by using the magnetron sputtering method.Then,a layer of silicon oxide superhydrophobic film was coated on the surface of the Pd film by using a dip coater,which was used to prevent water molecules from entering into the palladium film,causing the palladium film to detach from the surface of the optical fiber,thereby enhancing the stability of the sensor in the liquid phase environment.The effect of the thickness of the Pd film on the hydrogen-sensitive response characteristics of the sensor was experimentally studied,and H 2 concentration in the liquid phase was detected using the sensor.The study shows that the sensor can accurately respond to the change of the H 2 concentration in liquid phase,and when the thickness of the Pd film is 120 nm,the sensitivity reached-15.29 pm/%and the maximum relative error is 8.67%.

关 键 词：倾斜光纤光栅 传感器 液相 氢气浓度 钯膜 超疏水涂膜 

分 类 号：TN253[电子电信—物理电子学]