基于XL-80激光干涉仪的直线度误差测量研究  

Research on Straightness Error Measurement Based on XL-80 Laser Interferometer

作　　者：朱雅蓉 杨金国 杜文文 ZHU Yarong;YANG Jinguo;DU Wenwen(Anhui Wuhu Technician College,Wuhu 241002,China)

机构地区：[1]安徽芜湖技师学院,安徽芜湖241000

出　　处：《电子质量》2023年第6期46-51,共6页Electronics Quality

摘　　要：为了提高数控机床的位置精度,通常会检测数控机床导轨的直线度误差。但在检测数控机床导轨的直线度误差时,时常会限制测量范围和精度误差。通过Reinshaw XL-80激光干涉仪可以实现对数控机床导轨的水平和垂直2个方位上的直线度测量。以THWLBTF-3型加工中心为试验平台,采用了Reinshaw XL-80激光干涉仪,通过非接触和在线测量加工中心X轴的直线度误差;通过软件测得试验数据,绘制出最小二乘法曲线图和端点拟合法曲线图,结果表明:加工中心直线度误差的大小是影响数控机床加工精度的重要因素之一。In order to improve the position accuracy of CNC machine tools,the straightness error of CNC machine tool guide rail is usually detected.When detecting the straightness error of CNC machine tools guide rail,the measur-ing range and accuracy error are often limited.The Reinshaw XL-80 laser interferometer can be used to the measure-ment of horizontal and vertical straightness of the guide rail of CNC machine tools.Taking the THWLBTF-3 machining center as the test platform,Reinshaw XL-80 laser interferometer is used to measure the straightness error of the Xaxis of the machining center by non-contact and online,and the test data are measured through by software,and the least square curve and the endpoint fitting curve are drawn.The results showed that the straightness error of machining center is one of the important factors affecting the machining accuracy of CNC machine tools.

关 键 词：XL-80激光干涉仪 THWLBTF-3型加工中心 直线度误差 直线度镜组 

分 类 号：TH744.3[机械工程—光学工程]