电容式超声换能器在医疗领域的研究进展  

Research progress of capacitive ultrasonic transducers in the field of medical treatment

作　　者：胡娟娟 李晓云[1] 高铁成[1] 杜俊浩 HU Juanjuan;LI Xiaoyun;GAO Tiecheng;DU Junhao(School of Electronics and Information Engineering,Tiangong University,Tianjin 300378,China)

机构地区：[1]天津工业大学电子与信息工程学院,天津300387

出　　处：《传感器与微系统》2023年第7期11-14,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61575144)。

摘　　要：随着超声技术和大规模集成电路的高速发展,各生产领域对电容式微机械超声换能器(CMUT)的研制成本、器件灵敏度、带宽比、成像帧率等性价比需求显著提高。从CMUT的主要应用方向超声医疗领域的研究为切入点,对CMUT在超声成像和超声治疗中的应用机理进行简述,并列举CMUT在超声医疗领域中的代表性研究成果。同时,综述了目前科技研究中CMUT的主要研制工艺与阵列结构,并对CMUT的结构及制造工艺进行了总结和比较,为CMUT在超声医疗领域中的科技创新做出展望。With the rapid development of ultrasonic technology and large-scale integrated circuits,the development cost of capacitive micromechanical ultrasonic transducer(CMUT),device sensitivity,bandwidth ratio,imaging frame rate and other cost-effective requirements in various production fields are significantly improved.Starting from the main application direction of CMUT in the field of ultrasonic medicine,this paper briefly describes the application mechanism of CMUT in ultrasonic imaging and ultrasonic therapy,and enumerates the representative research achievements of CMUT in the field of ultrasonic medicine.At the same time,main development processes and array structures of CMUT are summarized in the current scientific and technological research,the structures and manufacturing processes of CMUT are summarized and compared,and the scientific and technological innovation of CMUT in the field of ultrasonic medicine is prospected.

关 键 词：电容式微机械超声换能器阵列 工艺制造 超声成像 超声治疗 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB552[自动化与计算机技术—控制科学与工程]