温湿度控制在半导体制程中的作用研究  

The Function Of Temperature&Humidity Control In Semiconductor Process

作　　者：王丽鹤 张明松 高晓旭 WANG Lihe;ZHANG Mingsong;GAO Xiaoxu

机构地区：[1]沈阳芯源微电子设备股份有限公司,辽宁沈阳110168

出　　处：《今日自动化》2023年第5期103-105,共3页Automation Today

摘　　要：结合温湿度控制在半导体工艺各流程中的重要性,论述了不同工艺步骤专用设备,对温湿度的控制的必要性,对所处的洁净室环境提出了更高要求。随着半导体制程进入纳米级,温湿度控制要求更精细化、智能化。确保半导体的质量和器件的性能,可以提高生产效率和减少生产成本。因此,在半导体工艺的设计和运行中,必须充分考虑温湿度控制这一因素。Combined with the importance of temperature and humidity control in each process of semiconductor technology,the paper discusses the special equipment of different process steps,the necessity of temperature and humidity control,put forward higher requirements for the clean room environment.With the semiconductor process into the nano level,temperature and humidity control requirements more refined,intelligent.Thus,the quality of the semiconductor and the performance of the device can be ensured,and the production efficiency can be improved and the production cost can be reduced.Therefore,in the design and operation of semiconductor process,temperature and humidity control must be fully considered.

关 键 词：半导体设备 工艺制程 模块化 静电放电 

分 类 号：TN305[电子电信—物理电子学]