Charge Density-Based Pyroelectric Vacuum Sensor  

作　　者：Lan Xu Geng Huangfu Yiping Guo Ya Yang 

机构地区：[1]CAS Center for Excellence in Nanoscience,Beijing Key Laboratory of Micro-nano Energy and Sensor,Beijing Institute of Nanoenergy and Nanosystems,Chinese Academy of Science,Beijing 101400,P.R.China [2]State Key Laboratory of Metal Matrix Composites,School of Materials Science and Engineering,Shanghai Jiao Tong University,Shanghai 200240,P.R.China [3]School of Nanoscience and Technology,University of Chinese Academy of Sciences,Bejing,100049,P.R.China [4]School of Chemistry and Chemical Engineering,Center on Nanoenergy Research,Guangxi University,Nanning,Guangxi,530004,P.R.China

出　　处：《Research》2023年第2期379-388,共10页研究（英文）

基　　金：This work was supported by the National Natural Science Foundation of China(No.52072041);the Beijing Natural Science Foundation(Grant No.JQ21007);the Basic Research Project of Science and Technology of Shanghai(No.20JC1415000)。

摘　　要：A traditional thermal conductivity vacuum gauge mainly detects low pressure(the degree of vacuum)by measuring the temperature change of a filament heated by the electric current.We propose a novel pyroelectric vacuum sensor that utilizes the effect of ambient thermal conductivity on the pyroelectric effect to detect vacuum through the charge density of ferroelectric materials under radiation.

关 键 词：VACUUM CONDUCTIVITY utilize 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]