集成电路企业含氟废水深度处理示范工程分析  

Analysis on a Demonstration Project of Advanced Treatment of Fluoride Wastewater from Integrated Circuit Enterprises

作　　者：卢永 汪林 张炜铭[1,2] 黄如全 冯向文 张孝林 吕振华[2] LU Yong;WANG Lin;ZHANG Wei‑ming;HUANG Ru‑quan;FENG Xiang‑wen;ZHANG Xiao‑lin;LÜZhen‑hua(State Key Laboratory of Pollution Control and Resource Reuse,School of Environment,Nanjing University,Nanjing 210023,China;State Environmental Protection Engineering Center for Organic Chemical Industrial Wastewater Disposal and Resource Reuse,Jiangsu NJU Environmental Technology Co.Ltd.,Nanjing 210046,China)

机构地区：[1]南京大学环境学院污染控制与资源化研究国家重点实验室,江苏南京210023 [2]江苏南大环保科技有限公司国家环境保护有机化工废水处理与资源化工程技术中心,江苏南京210046

出　　处：《中国给水排水》2023年第12期141-144,共4页China Water & Wastewater

基　　金：国家重点研发计划“纳米科技”重点专项(2016YFA0203100);污染控制与资源化研究国家重点实验室开放基金资助项目(PCRRF19008)。

摘　　要：集成电路行业生产过程中会产生大量含氟废水,随着氟排放标准逐渐提高,采用传统沉淀法已难以满足需求。针对南京市某工业园区污水处理厂集成电路含氟废水,示范项目采用“混凝沉淀-纳米材料吸附”组合工艺进行处理,处理规模为1000 m^(3)/d。三个月的运行结果表明,进水氟浓度为4~5.5 mg/L,出水氟浓度稳定达到1 mg/L以下。该项目直接投资约550万元,废水处理成本约1.966元/m^(3)。A large amount of fluoride wastewater is produced in the process of integrated circuit industry.With a gradual improvement of fluoride discharge standard,it is difficult to meet the requirement by using traditional precipitation methods.A combined process of coagulation sedimentation and nano‑material adsorption is adopted to treat the integrated circuit wastewater from an industrial park wastewater treatment plant in Nanjing.The project scale is 1000 m^(3)/d and the influent fluoride concentration is 4-5.5 mg/L.Within three months,the effluent fluoride concentration remained below 1 mg/L.The investment of the demonstration project is about 5.5 million yuan,and the total cost of wastewater treatment is about 1.966 yuan/m^(3).

关 键 词：集成电路 含氟废水 深度处理 化学沉淀 纳米材料吸附 

分 类 号：TU992[建筑科学—市政工程]