A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions  

作　　者：Zachary H.Levine Bradley K.Alpert Amber L Dagel Joseph W.Fowler Edward S.Jimenez Nathan Nakamura Daniel S.Swetz Paul Szypyt Kyle R.Thompson Joel N.Ulom 

机构地区：[1]National Institute of Standards and Technology,Gaithersburg,MD 20899,USA [2]National Institute of Standards and Technology,Boulder,CO 80305,USA [3]Sandia National Laboratories,Albuquerque,NM 87123,USA [4]Department of Physics,University of Colorado,Boulder,CO 80309,USA

出　　处：《Microsystems & Nanoengineering》2023年第2期249-259,共11页微系统与纳米工程（英文）

基　　金：Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia LLC(NTESS),a wholly owned subsidiary of Honeywell International Inc,for the U.S.Department of Energy's National Nuclear Security Administration(NNSA)under contract DE-NA0003525;funded in part by the Office of the Director of National Intelligence(ODNI);Intelligence Advanced Research Projects Activity(IARPA);via agreements D2019-1908080004,D2019-1906200003,D2021-2106170004,and FA8702-15-D-0001.

摘　　要：We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process.The reconstructions employ x-ray computed tomography,measured with a new and innovative high-magnification x-ray microscope.The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample.The x-ray generation target,a layer of platinum,is fabricated on the circuit wafer itself.A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit.The reconstruction is consistent with the circuit's design file.

关 键 词：PROCESS removing PLATINUM 

分 类 号：O57[理学—粒子物理与原子核物理]