Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators  

作　　者：John Linden Neta Melech Igor Sakaev Ofer Fogel Slava Krylov David Nuttman Zeev Zalevsky Marina Sirota 

机构地区：[1]Department of Engineering,Bar lan University,Ramat Gan,Isral [2]Research and Incubation,ERC,KLA,Yavne,Israel [3]School of Mechanical Engineering,Faculty of Engineering,Tel-Aviv University,Tel Aviv,Israel [4]Engineering Department,TAMAM,IAl,Yehud,Israel

出　　处：《Microsystems & Nanoengineering》2023年第2期295-306,共12页微系统与纳米工程（英文）

摘　　要：A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced.This approach is based on the laser-induced chemical etching of quartz.The main processing steps include femtosecond UV laser treatment of a Cr-Au-coated Z-cut alpha quartz wafer,followed by wet etching.The laser-patterned Cr-Au coating serves as an etch mask and is used to form electrodes for piezoelectric actuation.This fabrication approach does not alter the quartz's crystalline structure or its piezo-electric properties.The formation of defects,which is common in laser micromachined quartz,is prevented by optimized process parameters and by controlling the temporal behavior of the laser-matter interactions.The process does not involve any lithography and allows for high geometric design flexibility.Several configurations of piezoelectrically actuated beam-type resonators were fabricated using relatively mild wet etching conditions,and their functionality was experimentally demonstrated.The devices are distinguished from prior efforts by the reduced surface roughness and improved wall profiles of the fabricated quartz structures.

关 键 词：QUARTZ FEMTO PIEZOELECTRIC 

分 类 号：TN24[电子电信—物理电子学]