(0001)面氧化锌单晶微纳米尺度划痕特性实验研究  

Experimental Study on Micro-nano Scale Scratch Characteristics of(0001)Plane ZnO Single Crystal

作　　者：李继军[1,2] 李源明 张丽华 郎风超 杨诗婷[1] 王旭东[1] 杨文欣 LI Ji-jun;LI Yuan-ming;ZHANG Li-hua;LANG Feng-chao;YANG Shi-ting;WANG Xu-dong;YANG Wen-xin(College of Science,Inner Mongolia University of Technology,Hohhot 010051,China;School of Mechanical and Energy Engineering,Shanghai Technical Institute of Electronics&Information,Shanghai 201411,China;School of Science,Shanghai Maritime University,Shanghai 201306,China)

机构地区：[1]内蒙古工业大学理学院,呼和浩特010051 [2]上海电子信息职业技术学院机械与能源工程学院,上海201411 [3]上海海事大学理学院,上海201306

出　　处：《表面技术》2023年第7期231-238,共8页Surface Technology

基　　金：内蒙古自然科学基金(2022MS01009);国家自然科学基金(11972221,12002174,11562016);内蒙古自治区高等学校科研项目(NJZY22383)。

摘　　要：目的对(0001)面ZnO单晶微纳米尺度划痕特性进行实验研究,为ZnO单晶器件性能提升及ZnO单晶精密加工工艺优化等提供必要的科学依据。方法采用Berkovich金刚石压头棱向前和面向前2种划痕方式,在不同划痕速度下对(0001)面ZnO单晶进行了纳米划痕实验,分析了划痕速度和划痕方式对其微纳米尺度划痕特性的影响。结果当划痕速度从2μm/s增加到100μm/s时,棱向前划痕方式下的深度从352.9 nm降到了326.9 nm,面向前划痕方式下的深度从352.7 nm降到了289.9 nm;棱向前划痕方式下的切向力从4.15 mN降到了3.93 mN,面向前划痕方式下的切向力从5.12 mN降到了4.45 mN;棱向前划痕方式下的摩擦因数从0.21降到了0.19,面向前划痕方式下的摩擦因数从0.25降到了0.2;棱向前划痕方式下的残余划痕深度从162.2 nm降到了138.4 nm,面向前划痕方式下的残余划痕深度从148.3 nm降到了129.9 nm;棱向前划痕方式下的残余划痕两侧塑性堆积高度从23 nm降到了17 nm,面向前划痕方式下的残余划痕两侧塑性堆积高度从18nm降到了11nm。结论随划痕速度的增加,(0001)面Zn O单晶的划痕深度、切向力、摩擦因数、残余划痕深度及划痕两侧塑性堆积高度均在下降。在相同划痕速度下,棱向前划痕方式下的划痕深度、残余划痕深度及划痕两侧塑性堆积高度都比面向前划痕方式下的要大,而棱向前划痕方式下的切向力和摩擦因数都比面向前划痕方式下的要小。As an important group II-VI semiconductor material,zinc oxide(ZnO)single crystal has excellent optical,electrical,pressure-sensitive,and gas-sensitive properties,which makes it suitable for short-wavelength optoelectronic devices,piezoelectric converters,varistors,transparent high-power electronic devices,solar cells and other aspects.Zinc oxide(ZnO)single crystal has broad application prospects.However,during the process of crystal processing and device using,ZnO single crystal will have scratches,pits,micro-cracks and other surface damages under the action of external stressing,which will lead to performance degradation of material and device or even invalidity.Therefore,the work aims to study the micro-nano scale scratch properties of(0001)plane ZnO single crystal experimentally,to provide an important scientific basis for improving the performance of ZnO single crystal devices.Nanoscratch tests were carried out on(0001)plane ZnO single crystal at different scratch velocities through both edge-forward and face-forward scratch mode.(0001)plane ZnO single crystal sample size was 10 mm×5 mm×1 mm.The nanoscratch test parameters were:the scratch normal load was 20 mN,the scratch velocity was 2,10,20,50 and 100μm/s,respectively and the scratch distance was 100μm.To avoid the effect on the experimental accuracy of temperature,all tests were performed at a temperature of about 23℃.The morphology of the grooves after nanoscratch was observed.Finally,the effects of scratch velocity and scratch mode on the micro-nano scale scratch characteristics were analyzed.When the scratch velocity increased from 2μm/s to 100μm/s,the scratch depth corresponding to edge-forward scratch mode decreased from 352.9 nm to 326.9 nm,and that corresponding to face-forward scratch mode decreased from 352.7 nm to 289.9 nm;the lateral force corresponding to edge-forward scratch mode was reduced from 4.15 mN to 3.93 mN,and that corresponding to face-forward scratch mode was reduced from 5.12 mN to 4.45 mN;the friction coefficient correspo

关 键 词：(0001)面氧化锌单晶 微纳米尺度 划痕特性 纳米划痕 划痕速度 划痕方式 

分 类 号：O469[理学—凝聚态物理]