双光路干涉测量的控制系统设计  

Design of control system for double optical path interferometry

作　　者：贾旭 韩森[2,3] 吴泉英 JIA Xu;HAN Sen;WU Quanying(School of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China;School of Optical-electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Suzhou H&L Instruments LLC,Suzhou 215123,China)

机构地区：[1]苏州科技大学物理科学与技术学院,江苏苏州215009 [2]上海理工大学光电信息与计算机工程学院,上海200093 [3]苏州慧利仪器有限责任公司,江苏苏州215123

出　　处：《应用光学》2023年第4期842-851,共10页Journal of Applied Optics

基　　金：国家重大科研仪器研制项目(62127901)。

摘　　要：传统的大口径光学元件干涉测量方法依赖于根据不同测试样品人为改变扩束镜头和光路结构,该方法会不可避免引入一些系统误差,因此针对双光路干涉仪的功能需要和仿真实验,提出了一套对应的双线控制方案。通过蓝牙通信、串口通信和机械结构的相互配合可以对光路进行多次折转和校准,使得每次切换测量口径后的光学元件变化位置固定,并在基于MFC(microsoft foundation classes)开发的交互界面显示实时状态。结果表明:在450 mm测量口径下,PV_(10)测量重复性可达到0.004λ,RMS测量重复性可达到0.0004λ;在100 mm测量口径下,PV_(10)测量重复性可达到0.0008λ,RMS测量重复性可达到0.00016λ。实验结果表明该系统保障了优越的测量效率和测量重复性,为双光路干涉仪的研发提供了参考价值。The traditional interferometry method of large-aperture optical element relies on artificially changing the beam expanding lens and optical path structure according to different test samples.This method inevitably introduces some systematic errors.Therefore,a set of corresponding dual-line control scheme was proposed according to the functional requirements of the dual-optical path interferometer and the simulation experiment.Through the cooperation of bluetooth communication,serial communication and mechanical structure,the optical path could be converted and calibrated for many times,so that the changing position of the optical element after each switch of the measurement diameter was fixed,and the real-time status was displayed in the interactive interface based on microsoft foundation classes(MFC).The results show that under 450 mm measurement diameter,the measurement repeatability of PV_(10)can reach 0.004λ,and that of rootmean-square(RMS)can reach 0.0004λ.Under 100 mm measurement diameter,the measurement repeatability of PV_(10)can reach 0.0008λ,and that of RMS can reach 0.00016λ.Finally,the experimental results show that the system ensures the superior measurement efficiency and repeatability,which provides reference value for the research and development of dual-optical path interferometers.

关 键 词：双光路激光干涉仪 可视化控制 测量重复性 蓝牙通信 串口通信 

分 类 号：TN248.2[电子电信—物理电子学]