基于机器视觉的数字式角振动传感器动态校准方法  

Dynamic calibration method of digital angular vibration sensor based on machine vision

作　　者：刘文峰 杨明 蔡晨光[2] 刘志华[2] 杨靖[1] LIU Wenfeng;YANG Ming;CAI Chenguang;LIU Zhihua;YANG Jing(College of Electrical Engineering,Guizhou University,Guiyang 550025,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]贵州大学电气工程学院,贵阳550025 [2]中国计量科学研究院,北京100029

出　　处：《振动与冲击》2023年第13期177-182,共6页Journal of Vibration and Shock

基　　金：国家自然科学基金(52075512);国家重点研发计划资助(2017Y FF0205003);贵州省教育厅青年科技人才成长项目(黔教合KY字[2022]138号);贵州省科技基金(黔科合基础[2020]1Y266);贵州省教育厅创新群体(黔教合KY字[2021]012);贵州大学博士基金项目贵大人基合字(2020)30号。

摘　　要：低频角振动传感器在惯性导航、姿态估计及精密控制等领域具有广泛应用,其灵敏度校准精度是决定应用系统性能的关键。激光干涉法与圆光栅法是最常用的两种校准方法,然而前者需要昂贵与复杂的系统,后者的校准频率范围与应用场景有限,难以满足日益增长的高性能角振动传感器校准需求;通过采用具有亚像素级边缘提取精度的机器视觉法准确地测量低频角振动传感器的输入角激励,以实现宽低频范围的灵敏度可靠校准,同时保证校准精度与效率。与激光干涉法及圆光栅法的对比试验表明,机器视觉法与激光干涉法及圆光栅法在0.01~5.00 Hz范围内具有相似的校准结果,最大相对偏差分别约为0.6%和0.4%;此外,整个频率范围内,机器视觉法校准的最大灵敏度相对标准差约为0.5%。Low-frequency angular vibration sensors are widely used in fields of inertial navigation,attitude estimation and precision control,etc.,and their sensitivity calibration accuracy is key to determine performance of application system.Laser interferometry and circular grating are the two most commonly used calibration methods.However,the former requires expensive and complex systems,and the latter has limited calibration frequency range and application scenes,they are difficult to meet growing demands for calibration of high-performance angular vibration sensors.Here,the machine vision method with subpixel edge extraction accuracy was used to accurately measure input angular excitation of low-frequency angular vibration sensor to realize reliable calibration of the sensitivity in a wide low-frequency range,and ensure calibration accuracy and efficiency.Contrastivetestsfor the proposed method with laser interferometry and circular grating methods showedthat machine vision method has similar calibration results to those obtained using laser interferometry and circular grating within the range of 0.01-5.00 Hz,theirmaximum relative deviationsare about 0.6%and 0.4%,respectively;the relative standard deviation of the maximum sensitivity of machine vision calibration is about 0.5%within the whole frequency range.

关 键 词：振动校准 角振动传感器 机器视觉法 激光干涉法 圆光栅法 

分 类 号：TB936[一般工业技术—计量学]