应用于集成电路测试的微探针电学特性研究  

Study on the Electrical Characteristics of Microprobes Applied in Integrated Circuit Testing

作　　者：刘耀义 余敏 LIU Yaoyi;YU Min(Huizhou Blue Microelectronics Co.,Ltd.,Huizhou 516029,China)

机构地区：[1]惠州市蓝微电子有限公司,广东惠州516029

出　　处：《无线电工程》2023年第8期1974-1980,共7页Radio Engineering

基　　金：国家重点研发计划项目课题“低功耗、低时延、海量连接工业互联网应用示范”项目子课题“工业互联网仿真评测与工业制造领域应用示范”资助(2018YFB1802403)。

摘　　要：为了研究集成电路测试中微探针的电学特性,采用自动测量和分析阻抗特性的pogo微探针,组成了一个具有运动控制和导纳测量仪的晶片探针导纳测试系统。基于伏安法研究了不同加载频率下探针的导纳特性。结果表明,当加载频率<100 kHz时,探针是电阻性的;当频率>100 kHz时,探针是电感性的。此外,当频率在200~400 kHz时,探针的导纳最小。同时,当频率在1~500 kHz时,针尖的电导率小于爪针,而针尖的电纳和电阻大于爪针,这主要是由于探针与焊料之间接触的变化。In order to study the electrical characteristics of micro probes in integrated circuit testing,a chip probe admittance testing system with motion control and admittance measurement instrument is developed using pogo microprobes which can automatically measure and analyze impedance characteristics.The admittance characteristics of the probe at different loading frequencies are studied based on voltammetry.The results indicate that when the loading frequency is less than 100 kHz,the probe is resistive,and when the frequency is over 100 kHz,the probe is inductive.In addition,when the frequency is between 200 kHz and 400 kHz,the admittance of the probe is the minimum.At the same time,when the frequency is between 1 kHz and 500 kHz,the conductivity of the needle tip is smaller than that of the claw needle,while the admittance and resistance of the needle tip are greater than those of the claw needle,mainly due to the changes of the contact between the probe and the solder.

关 键 词：微探针 导纳谱 电纳 接触点 注射器针头 

分 类 号：TP23[自动化与计算机技术—检测技术与自动化装置]