Optimization of large-area YBa_(2)Cu_(3)O_(7-δ)thin films by pulsed laser deposition for planar microwave devices  

作　　者：熊沛雨 陈赋聪 冯中沛 杨景婷 夏钰东 袁跃峰 王旭 袁洁 吴云 石兢 金魁 Pei-Yu Xiong;Fu-Cong Chen;Zhong-Pei Feng;Jing-Ting Yang;Yu-Dong Xia;Yue-Feng Yuan;Xu Wang;Jie Yuan;Yun Wu;Jing Shi;Kui Jin(School of Physical Science and Technology,Wuhan University,Wuhan 430072,China;Beijing National Laboratory for Condensed Matter Physics,Institute of Physics,Chinese Academy of Sciences,Beijing 100490,China;Songshan Lake Materials Laboratory,Dongguan 523808,China;School of Physical Science and Technology,Southwest Jiaotong University,Chengdu 611756,China)

机构地区：[1]School of Physical Science and Technology,Wuhan University,Wuhan 430072,China [2]Beijing National Laboratory for Condensed Matter Physics,Institute of Physics,Chinese Academy of Sciences,Beijing 100490,China [3]Songshan Lake Materials Laboratory,Dongguan 523808,China [4]School of Physical Science and Technology,Southwest Jiaotong University,Chengdu 611756,China

出　　处：《Chinese Physics B》2023年第7期186-190,共5页中国物理B（英文版）

基　　金：Project supported by the National Key Basic Research Program of China(Grant Nos.2022YFA1603903 and 2021YFA0718700);the Key-Area Research and Development Program of Guangdong Province,China(Grant No.2020B0101340002);the National Natural Science Foundation of China(Grant Nos.61971415,51972012,11927808,119611410,11961141008,and 12274439);the Strategic Priority Research Program(B)of Chinese Academy of Sciences(Grant No.XDB25000000);Beijing Natural Science Foundation(Grant No.Z190008);Basic Research Youth Team of Chinese Academy of Sciences(Grant No.2022YSBR-048).

摘　　要：This paper presents high quality YBa_(2)Cu_(3)O_(7-δ)(YBCO)thin films on LaAlO_(3)substrate for microwave devices prepared by pulsed laser deposition(PLD).The double-sided YBCO films cover a large area and have been optimized for key parameters relevant to microwave device applications,such as surface morphology and surface resistance(R_(s)).This was achieved by improving the target quality and increasing the oxygen pressure during deposition,respectively.To evaluate the suitability of the YBCO films for microwave devices,a pair of microwave filters based on microstrip fabricated on films from this work and a commercial company were compared.The results show that the YBCO films in this work could completely meet the requirements for microwave devices.

关 键 词：YBCO films pulsed laser deposition(PLD) surface resistance microwave devices 

分 类 号：TB383.2[一般工业技术—材料科学与工程]