工业CT成像技术在霍尔电流传感器质量检测中的应用  

Application of industrial CT technology in Hall current sensor quality inspection

作　　者：陈安娜 唐盛明[2] 齐子诚[2] CHEN Anna;TANG Shengming;QI Zicheng(Volkswagen(China)Investment Company Limited Shanghai Branch,Shanghai 201805,China;The Ningbo Branch of Ordnance Science Institute of China,Ningbo 315103,China)

机构地区：[1]大众汽车(中国)投资有限公司上海分公司,上海201805 [2]中国兵器科学研究院宁波分院,宁波315103

出　　处：《无损检测》2023年第5期6-10,共5页Nondestructive Testing

基　　金：浙江省公益技术研究计划项目(LGG20F010003);宁波市重大科技攻关项目(20211ZDYF020203)。

摘　　要：使用工业CT技术监测了霍尔电流传感器排针注塑体间的异物形态,并检测了二次注塑芯片中的引线弯曲、拉弧、球键合情况。通过CT图像分析,计算了针间异物的长宽尺寸,分析了形成机理,在此基础上,对排针注塑工艺进行制程改进。对分析难度大、体型微小的霍尔芯片,计算得到其注塑体内引线的弧长、弧高、弯曲角度、焊球直径等参数,进而对键合压力、烧球参数和工具做出调整,增加连接引线工艺的稳定性。使用工业CT技术提供的检测信息改善了霍尔电流传感器的制造工艺和环境,提高了器件的可靠性,提升了产品质量。Industrial CT technology was used to monitor the shape of heteromorphic matters between injection molding pins of Hall current sensor and the bending,arcing and bonding of wires in the Hall chip.Through CT image analysis,the length and width of the heteromorphic matters were calculated quantitatively.Further,the molding process was improved.For the internal Hall chip,which is difficult to analyze and small in size,this research calculated the arc length,arc height,bending angle,solder ball diameter and other parameters of the wires in situ by analyzing industrial CT images.In this study,the information provided by industrial CT technology was used to optimize the process flow and manufacturing environment of Hall current sensor,so as to improve the device reliability and product quality.

关 键 词：工业CT 霍尔电流传感器 无损检测 霍尔芯片 

分 类 号：TG115.28[金属学及工艺—物理冶金]