用于介电常数测量的小型化微波传感器的设计  

Design of Miniaturized Microwave Sensor for Dielectric Constant Measurement

作　　者：施翔宇 尹波[1] SHI Xiangyu;YIN Bo(College of Optoelectronic Engi neering,Chongqing University of Posts and Telecommunications,Ch ongqing 400065,China)

机构地区：[1]重庆邮电大学光电工程学院,重庆400065

出　　处：《电子器件》2023年第3期641-645,共5页Chinese Journal of Electron Devices

基　　金：重庆市研究生研究创新项目(CYS22445)。

摘　　要：提出了一种基于慢波结构的半模基片集成波导的介电常数微波传感器。该传感器将新型互补开口谐振环加载到半模基片集成波导上,用于低损耗介质介电常数的测量。在半模基片集成波导上加载金属化盲孔阵列,将大部分电场集中在上基板上,实现电场和磁场的有效分离,从而实现横向和纵向尺寸的同时减小,并表现出典型的慢波效应现象。传感器通过在介质平面上加载带有“T”字型枝节的互补开口谐振环,可以获得更均匀、更集中的电场,从而增强传感器的灵敏度。仿真和实验结果表明,每单位介电常数的谐振频率偏移量达到124 MHz,灵敏度达到2.76%。用该传感器测量已知标准值待测材料的介电常数时,实部相对误差小于2%,虚部相对误差小于0.005。A novel miniaturized slow-wave half-mode substrate integrated waveguide(SW-HMSIW)microwave sensor for low loss media dielectric constant measurement is proposed. The novel Complementary Split Ring Resonator(CSRR)is loaded into SW-HMSIW in this design. HMSIW loaded with metalized blind hole array is used to concentrate most of the electric field on the upper substrate and realize the effective separation of electric field and magnetic field, showing typical slow-wave effect phenomenon. By loading CSRR with a T-shaped branch in the ground plane, a more uniform and more concentrated electric field is achieved. Simulation and experimental results show that the resonant frequency offset of 124 MHz for the per-unit dielectric constant is reached, and the sensitivity reaches 2.76%. When the sensor is used to measure the dielectric constant of the material under test(MUT)with known standard values, the relative error of the real part is less than 2% and the relative error of the imaginary part is less than 0.005.

关 键 词：介电常数 慢波 半模基片集成波导 互补开口谐振环 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TN61[自动化与计算机技术—控制科学与工程]