集成电路芯片制造特种气体供应系统设计与施工工艺研究  

Research on the Design and Construction Technology of Special Gas Supply System for Integrated Circuit Chip Manufacturing

作　　者：丁治 DING Zhi(MIC-TECH Electronics Engineering Corp.,Shanghai 201206,China)

机构地区：[1]上海吉威电子系统工程有限公司,上海201206

出　　处：《工程技术研究》2023年第9期5-8,共4页Engineering and Technological Research

摘　　要：集成电路芯片制造业是目前世界上技术先进、竞争激烈的行业之一。在芯片制造过程中,高纯度、高洁净度的特殊气体是必不可少的原料,如何将这些特种气体安全、洁净地输送到生产所需的机台中供其使用是当前研究的重点。文章对集成电路制造工厂内特种气体供应系统深化设计、施工工艺和验收前的质量检测进行了研究,对特种气体管道供应系统中应重点关注的内容进行了论述,希望为相关研究人员提供参考。The integrated circuit chip manufacturing industry is currently one of the technologically advanced and fiercely competitive industries in the world.In the process of chip manufacturing,special gases with high purity and cleanliness are essential raw materials.How to transport the special gas safely and cleanly to the machines needed for manufacturing is the focus of current research.The deepening design,construction technology and quality inspection before acceptance of special gas supply system in integrated circuit manufacturing plant are studied,and the contents that should be paid attention to in special gas pipeline supply system are discussed,hoping to provide reference for relevant researchers.

关 键 词：集成电路 芯片制造 特种气体供应系统 施工工艺 质量检测 

分 类 号：TN405[电子电信—微电子学与固体电子学]