柔性压力传感器成型技术及制备工艺研究进展  

Research Progress of Flexible Pressure Sensor's Molding Technologies and Preparation Processes

作　　者：吴旭鹏 方玉明[1,2] 费宏欣 蔡滕 赵江[1,2] 李若舟 WU Xupeng;FANG Yuming;FEI Hongxin;CAI Teng;ZHAO Jiang;LI Ruozhou(School of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,P.R.China;National Joint Engineering Laboratory of RF Integration and Microassembly Technology,Nanjing University of Posts and Telecommunications,Nanjing 210023,P.R.China)

机构地区：[1]南京邮电大学集成电路科学与工程学院,南京210023 [2]南京邮电大学射频集成与微组装技术国家地方联合工程实验室,南京210023

出　　处：《微电子学》2023年第2期295-303,共9页Microelectronics

基　　金：江苏省研究生科研与实践创新计划项目(SJCX21_0273);国家自然科学基金青年基金资助项目(11904177,61704090);南京邮电大学射频集成与微组装技术国家地方联合工程实验室开放课题(KFJJ20210205)。

摘　　要：应用日益广泛的可穿戴设备要求其中的传感器件可拉伸、可弯曲,因此柔性传感器已受到人们的重视。文章对柔性压力传感器的微结构、材料、制备工艺等方面进行了综述,重点总结了现阶段柔性传感器所采用的各种结构,比较了天然微结构、仿生表面微结构、多孔结构、多级结构、多层结构柔性压力传感器的重要性能。介绍了目前常用的柔性基底材料和导电活性材料,对比了光刻技术、3D打印等制造工艺的优缺点,对柔性压力传感器的未来研究方向进行了展望。文章对相关柔性器件的研究具有较高的理论价值和工程参考意义。Wearable devices,which are widely used,require stretchable and bendable sensors,so flexible sensors have received much attention.This paper presents a review of flexible pressure sensors in terms of microstructures,materials,and preparation processes,focusing on summarizing the different structures of flexible sensors at the present stage and comparing the important properties of flexible pressure sensors with natural microstructures,bionic surface microstructures,porous structures,multilevel structures,and multilayer structures.The commonly used flexible substrate materials and conductive active materials are introduced.Comparing the advantages and disadvantages of lithography technology,3D printing and other manufacturing processes,it is found that the flexible pressure sensor with excellent comprehensive performance and repeatability is more complicated to manufacture and has a higher cost.The future research direction of flexible pressure sensor is prospected.This paper has a high theoretical value and engineering reference significance for related flexible devices.

关 键 词：柔性压力传感器 微结构 柔性基底材料 3D打印 

分 类 号：TN389[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]