互易压电加速度计校准技术研究  

Research on Calibration Technology of Reciprocal Piezoelectric Accelerometer

作　　者：吕思耀 蔡晨光[2] 孔明 杨明 刘志华[2] 吕琦 LYU Si-yao;CAI Chen-guang;KONG Ming;YANG Ming;LIU Zhi-hua;Lü Qi(Collage of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;The Electrical Engineering College,Guizhou University,Guiyang,Guizhou 550025,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]贵州大学电气工程学院,贵阳550025

出　　处：《计量学报》2023年第7期1080-1086,共7页Acta Metrologica Sinica

基　　金：国家重点研发计划(2017YFF0205003)。

摘　　要：介绍一种针对内部带有驱动部件的压电加速度计的校准方法,基于互易法的校准原理,通过2次试验测量2个端口灵敏度的比值和乘积,实现互易压电加速度计的校准。通过建立互易压电加速度计的振动方程及力学模型,分析了灵敏度比值、灵敏度乘积和自校准系数的频率响应特性,并说明了对应的校准方法。与激光干涉法进行了对比验证实验,实验结果表明:在频率范围5~4000 Hz,2个端口灵敏度的平均相对偏差分别不超过1%和2%,最大相对偏差分别不超过2%和4%。A calibration method for piezoelectric accelerometers with internal driving components was introduced.Based on the calibration principle of the reciprocal method,the reciprocal piezoelectric accelerometer can be calibrated by measuring the ratio and product of the two port sensitivities through two experiments.By establishing the vibration equation and mechanical model of the reciprocal piezoelectric accelerometer,the frequency response characteristics of the sensitivity ratio,sensitivity product and self-calibration coefficient are analyzed,and the corresponding measurement methods are explained.The comparison validation experiment between this method and the laser interferometry was carried out,the experimental results show that in the frequency range of 5~4000 Hz,the average relative deviation of the sensitivity of the two ports does not exceed 1%and 2%,respectively,and the maximum relative deviation does not exceed 2%and 4%,respectively.

关 键 词：计量学 振动校准 压电加速度计 互易法 电激励 

分 类 号：TB934[一般工业技术—计量学]