纳秒激光加工机械密封动压槽的槽深计算及实验验证  

Groove Depth Calculation and Experimental Verification in Nanosecond Laser Machining of Hydrodynamic Grooves of Mechanical Seal

作　　者：毛文元[1] 刘小磊 陈硕 宋鹏云[1] 许恒杰[1] Mao Wenyuan;Liu Xiaolei;Chen Shuo;Song Pengyun;Xu Hengjie(Faculty of Chemical Engineering,Kunming University of Science and Technology,Kunming 650500,Yunnan,China)

机构地区：[1]昆明理工大学化学工程学院,云南昆明650500

出　　处：《中国激光》2023年第12期261-268,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(52105189)。

摘　　要：为了实现高效、低成本的机械密封动压槽激光精密加工,基于槽深与激光能量密度和作用时间之间的关系,构建了一个简单有效的槽深计算模型,研究了激光功率、重复频率、扫描速度、填充间距和标刻次数等工艺参数对槽深的影响规律,并进行了实验验证。结果表明:在所研究的工艺参数取值范围内,槽深计算结果随变量参数变化的趋势和实验结果呈现良好的一致性,槽深与各个工艺参数之间具有明确的数学关系,即槽深与激光功率、标刻次数成正比,与扫描速度成反比,与填充间距近似成反比,且随重复频率的增大,槽深线性减小。在5组工艺参数计算案例中,槽深的计算结果与实验结果均较为吻合,槽深最大相对误差不超过15.07%。Objective The core technology of hydrodynamic mechanical seals,represented by a dry gas seal and an upstream pumping mechanical seal,is the precision machining of hydrodynamic grooves.Laser ablation has gradually become the main machining method for hydrodynamic grooves,and the accuracy of the groove depth can generally be controlled on the order of magnitude of microns,while the hydrodynamic groove depth is usually set to 5‒10μm.For hydrodynamic mechanical seals,the insufficient stiffness and opening force may be caused by small variations in the groove depth,leading to instability or failure of the sealing operation.Thus,there is a strict requirement of accuracy for the groove depth and achieving dynamic groove precision machining with high efficiency and at a low cost remains a challenge.Taking hydrodynamic mechanical seals as an example,a novel theoretical calculation model for hydrodynamic groove depth is proposed based on laser energy density and actuation duration in this study.The influence of the process parameters on the groove depth is fully investigated by calculating the groove depth and comparing it with the experimental value,which provides a reference for the laser processing of hydrodynamic grooves of mechanical seals and microgroove processing in other fields.Methods A novel theoretical calculation model for hydrodynamic groove depth was established based on the relationship among the groove depth,laser energy density,and actuation duration.For a silicon carbide(SiC)sealing ring,a theoretical analysis on the laser machining of square hydrodynamic grooves was carried out by the control variable method.Moreover,an experimental comparison investigation was implemented by employing a fiber laser marking machine and a surface roughness profile shape measuring machine to explore the influence of the process parameters(e.g.,laser power,repetition rate,scanning speed,filling spacing,and number of marking)on the hydrodynamic groove depth.Results and Discussions The depth of the hydrodynamic groove dep

关 键 词：激光技术 激光加工 机械密封 动压槽 槽深计算 工艺参数 

分 类 号：TB42[一般工业技术]