模拟开关皮安级漏电流测试方法的研究与实现  

Research and Implementation of Measuring Method of Picoampere Leakage Current of Analog Switch

作　　者：王威 王婷 李明远 WANG Wei;WANG Ting;LI Mingyuan(Beijing Institute of Microelectronics,Beijing 100076,China)

机构地区：[1]北京微电子技术研究所,北京100076

出　　处：《通信电源技术》2023年第10期28-30,共3页Telecom Power Technology

摘　　要：传统的模拟集成电路测试系统的电流测量最小精度为纳安级,但是随着集成电路行业的快速发展,目前以模拟开关为代表的一些模拟器件的电流测试指标已经要求达到皮安级别。为了满足量产测试需求,以一款模拟开关为研究对象,搭建了基于ETS-364B测试系统和安捷伦高精度数字万用表3458A协同测试的高精度自动测试平台,在Visual C++编程环境中应用VISA函数库开发了基于通用接口总线(General Purpose Interface Bus,GPIB)的应用层驱动程序,实现了模拟开关皮安级漏电流的测量。The minimum accuracy of current measurement in traditional analog integrated circuit test system is nanoampere level,but with the rapid development of integrated circuit industry,the current test indexes of some analog devices represented by analog switches have been required to reach picoampere level.In order to meet the requirements of mass production test,an analog switch is taken as the research object,and a high-precision automatic test platform based on ETS-364B test system and Agilent high-precision digital multimeter 3458A is built.In Visual C++programming environment,the application-layer driver based on General Purpose Interface Bus(GPIB)is developed,and the picoampere leakage current of analog switch is measured.

关 键 词：漏电流 通用接口总线(GPIB) VISA函数 自动测试系统 

分 类 号：TM564[电气工程—电器]