硅基垂直光栅耦合器的研究进展  

Research Progress of Silicon-Based Vertical Grating Couplers

作　　者：刘勇 冯松[1] 王迪 陈梦林 胡祥建 冯露露 LIU Yong;FENG Song;WANG Di;CHEN Menglin;HU Xiangjian;FENG Lulu(School of Science,Xi an Polytechnic University,Xi an 710048,China)

机构地区：[1]西安工程大学理学院,陕西西安710048

出　　处：《沈阳大学学报（自然科学版）》2023年第4期309-318,共10页Journal of Shenyang University：Natural Science

基　　金：国家重点研发计划项目(2018YFB2200500);国家自然科学基金资助项目(61204080);国家重点实验室基金资助项目(SKL201804);陕西省重点研发计划项目(2022GY-012);西安市科技计划项目(2020KJRC0026)。

摘　　要：对国内外硅基垂直光栅耦合器的研究进展进行了总结,讨论了均匀光栅耦合器和非均匀光栅耦合器的研究现状,并对相关耦合器的性能参数做了对比和分析,为未来继续研发更高耦合效率、更大耦合带宽的垂直光栅耦合器提供思路与参考。The research progress of silicon-based vertical grating couplers at home and abroad was summarized,the research status of uniform grating couplers and non-uniform grating couplers was discussed,and the performance parameters of related couplers were compared and analyzed,which provided ideas and references for the future development of vertical grating couplers with higher coupling efficiency and larger coupling bandwidth.

关 键 词：光子器件 光波导 硅基 光栅耦合器 垂直耦合 

分 类 号：TN256[电子电信—物理电子学]