光学元件激光预处理技术研究进展及其应用  

Research progress and application of laser preconditioning technology for optical components

作　　者：张晶晶 杨峰[1,2] 寇洋 王灼寒 袁磊[1,2] 高宏伟[1,2] 薄勇[1,2] 彭钦军[1,2] Zhang Jingjing;Yang Feng;Kou Yang;Wang Zhuohan;Yuan Lei;Gao Hongwei;Bo Yong;Peng Qinjun(Key Laboratory of Solid State Laser,Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing 100190,China;Key Laboratory of Functional Crystals and Laser Technology,Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100149,China)

机构地区：[1]中国科学院理化技术研究所固体激光重点实验室,北京100190 [2]中国科学院理化技术研究所功能晶体与激光重点实验室,北京100190 [3]中国科学院大学,北京100149

出　　处：《强激光与粒子束》2023年第8期1-14,共14页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(61875208)。

摘　　要：光学元件中的杂质和缺陷会引起其激光损伤阈值的大幅降低,现阶段这一问题已成为激光装置向高功率、高能量方向发展的“瓶颈”,亟待解决。在对光学元件激光损伤的研究中发现,用低于光学元件损伤阈值的激光对元件表面进行预处理,可以有效提高光学元件的抗激光损伤能力。对激光预处理技术的提出背景、定性作用机理、定量理论模型及国内外技术应用现状进行了概述。并且介绍了一种可在薄膜制备过程中进行原位实时激光预处理的新型薄膜制备技术。最后指出,激光预处理技术作为一种无污染,可有效改善光学薄膜、光学玻璃、光学晶体元件损伤阈值的最有效方法之一,其作用机理、实用化、仪器化还有待进一步发展。Defects and impurities in optical components can lead to significant reduction in the laser damage threshold,which has become a“bottleneck”in the development of high-power and high-energy laser devices and needs to be solved urgently.In the study of laser damage of optical components,it is found that the laser damage resistance of optical components can be effectively improved by pretreating the surface of the components with a laser below the damage threshold.In this paper,the background,qualitative mechanism,quantitative theoretical model and application status of laser conditioning technology are summarized,and a new film conditioning technology for in-situ real-time laser conditioning of thin films is introduced.Finally,it is pointed out that laser conditioning is one of the most effective methods that can effectively improve the laser induced damage threshold of optical films,optical glasses,and optical crystal components.However,its mechanism,practicality,and instrumentation still need further development.

关 键 词：激光预处理 光学薄膜 杂质和缺陷 激光损伤阈值 

分 类 号：TN249[电子电信—物理电子学]