Compact in situ microscope for photoelectron spectroscopy via two-mirror reflection  

作　　者：岳晨阳 江虹 李天植 姚思研 曾生跃 许晓军 张超凡 Chenyang Yue;Hong Jiang;Tianzhi Li;Siyan Yao;Shengyue Zeng;Xiaojun Xu;Chaofan Zhang(College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China;State Key Laboratory of Pulsed Power Laser Technology,Changsha 410073,China;Hunan Provincial Key Laboratory of High Energy Laser Technology,Changsha 410073,China;Nanhu Laser Laboratory,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]College of Advanced Interdisciplinary Studies,National University of Defense Technology,Changsha 410073,China [2]State Key Laboratory of Pulsed Power Laser Technology,Changsha 410073,China [3]Hunan Provincial Key Laboratory of High Energy Laser Technology,Changsha 410073,China [4]Nanhu Laser Laboratory,National University of Defense Technology,Changsha 410073,China

出　　处：《Chinese Optics Letters》2023年第6期43-47,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.11774427)。

摘　　要：Photoelectron spectroscopy is a powerful tool in characterizing the electronic structure of materials.To investigate the specific region of interest with high probing efficiency,in this work we propose a compact in situ microscope to assist photoelectron spectroscopy.The configuration of long objective distance of 200 mm with two-mirror reflection has been introduced.Large magnification of 5×to 100×,lateral resolution of 4.08μm,and longitudinal resolution of 4.49μm have been achieved.Meanwhile,the testing result shows larger focal depth of this in situ optical microscope.Similar configurations could also be applied to other electronic microscopes to improve their probing capability.

关 键 词：photoelectron spectroscopy in situ optical microscope long objective distance large magnification 

分 类 号：TH742[机械工程—光学工程]