基于飞秒光纤光栅的高温FBG传感器阵列  

High-Temperature Fiber Bragg Grating Sensor Array Based on Femtosecond Fiber Grating

作　　者：赵贤 王永杰[2] 李慧聪 张登攀[1] Zhao Xian;Wang Yongjie;Li Huicong;Zhang Dengpan(School of Mechanical and Power Engineering,Henan Polytechnic University,Jiaozuo 454000,Henan,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronic Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]河南理工大学机械与动力工程学院,河南焦作454000 [2]中国科学院半导体研究所,北京100083 [3]中国科学院大学材料与光电研究中心,北京100049

出　　处：《激光与光电子学进展》2023年第11期340-345,共6页Laser & Optoelectronics Progress

摘　　要：以高功率散裂靶测温需要为牵引,设计并制备了一种基于飞秒光纤光栅的高温传感阵列。采用飞秒激光刻写的光纤光栅和管式封装方法,扩大并提升了传感器的测温范围和机械强度。研究并优化了涉及退火步骤、退火时间、退火温度在内的退火工艺,并进行多次退火(800℃,20 h)处理,提高了光纤布拉格光栅的稳定性。通过对其进行标定测试,获得了温度-波长的精确拟合函数。结果表明,传感器在100~500℃温度范围内的精度达±0.2℃。经过现场测试,该传感器可实现对高功率散裂靶温度的精确测试。In this study,a high-temperature sensing array based on a femtosecond fiber grating was designed to address the temperature measurement needs of high-power spallation targets.The temperature range and mechanical strength of the sensor were enhanced using a femtosecond laser-engraved fiber grating and a tubular encapsulation method.The annealing process,i.e.,annealing steps,annealing time,and annealing temperature,was investigated and optimized.Additionally,multiple annealing(800℃,20 h)was conducted to improve the stability of the fiber Bragg grating.An accurate fitting function of temperature-wavelength was obtained through its calibration test.The sensor has an accuracy of±0.2℃in the temperature range of 100‒500℃,with good repeatability.Moreover,on-site testing results indicate that the proposed sensor can achieve precise temperature testing of high-power spallation targets.

关 键 词：光纤布拉格光栅 高温传感器 高精度 温度测量 

分 类 号：TN253[电子电信—物理电子学]