溶胶凝胶ZrO_(2)/SiO_(2)宽带减反膜的制备与性能  

Preparation and Properties of Sol-Gel ZrO_(2)/SiO_(2) Broadband Antireflective Film

作　　者：沈斌[1,2] 张旭 熊怀[1] 李海元[1] 谢兴龙[1,2] Shen Bin;Zhang Xu;Xiong Huai;Li Haiyuan;Xie Xinglong(Key Laboratory of High Power Laser and Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光物理重点实验室,上海201800 [2]中国科学院大学材料与光电研究中心,北京100049

出　　处：《光学学报》2023年第11期283-289,共7页Acta Optica Sinica

基　　金：国家自然科学基金(12074399);中国科学院战略性先导科技专项A类(XDA25020305)。

摘　　要：采用溶胶凝胶法制备得到以正丙醇锆和正硅酸乙酯为前驱体的ZrO_(2)和SiO_(2)溶胶,通过TFCalc光学薄膜软件模拟了ZrO_(2)/SiO_(2)三层“宽M型”基频二倍频减反膜,并使用提拉法制备得到了该均匀膜层。三层减反膜在527 nm和1053 nm处的透过率约为99.5%,且透过率大于99%的波长范围均超过150 nm。经热处理后的膜层表面均方根粗糙度为1.34 nm,表面平整性良好;并运用1-on-1激光损伤阈值测试方法测得该减反膜的零几率激光损伤阈值达到36.8 J·cm^(-2)(1064 nm,10.7 ns)。Objective Preparing chemical films using the solgel method is very important in inertial confinement fusion laser devices.The antireflective(AR)films could be coated on glass elements such as target mirror,antisplash plate,beam sampling grating,and potassium dihydrogen phosphate/deuterated potassium dihydrogen phosphate(KDP/DKDP)crystal elements to achieve optical performance enhancement at specific wavelengths.The optical elements coated with AR films have a high laserinduced damage threshold(LIDT)due to the porous properties of the films.KDP/DKDP nonlinear optical elements for frequency doubling conversion need to simultaneously and efficiently transmit light with mixed wavelengths,which can be realized by coating different chemical AR films on them.Then,the system energy loss caused by the terminal components will be reduced during the operation of highpower laser devices.Methods ZrO_(2) and SiO_(2) sols were prepared by the solgel method with zirconium npropoxide and tetraethoxysilane as precursors.The threelayer"wideMtype"first harmonic and second harmonic AR film of ZrO_(2)/SiO_(2) was simulated by TFCalc optical film software and prepared by the dip coating method,and SiO_(2) doublelayer broadband AR film was prepared by the same method for performance comparison.The optical property,refractive index,micromorphology,and other characteristics of the threelayer"wideMtype"ZrO_(2)/SiO_(2) film were measured and analyzed by a UVVis spectrometer,a spectroscopic ellipsometer,a scanning electron microscope,and other equipment.Results and Discussions On the basis of an optical principle,the nonquarterwavelength threelayer"wideMtype"film system with a refractive index combination of 1.65/1.42/1.2 on K9 substrate(refractive index is 1.52)was simulated by TFCalc(Fig.1).This study selected ZrO_(2) and SiO_(2) as the materials of the threelayer solgel film,considering the existing solgel technology of the research group and simulation results.The transmittance of the uniform threelayer AR film at 527 nm and 1053 nm was

关 键 词：材料 溶胶凝胶 减反膜 ZrO_(2)/SiO_(2) 双波长 

分 类 号：O484.4[理学—固体物理]