高灵敏度ZnO纳米梁谐振式加速度计  

High sensitivity ZnO nanobeam resonant accelerometer

作　　者：许文元 唐彬[1] 赵宝林[1] 谢晋 XU Wenyuan;TANG Bin;ZHAO Baolin;XIE Jin(Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621999,China)

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999

出　　处：《传感器与微系统》2023年第8期78-80,84,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(62074138)。

摘　　要：针对谐振式加速度计灵敏度较低的问题,设计了一种基于化学气相沉积(CVD)法制备的ZnO纳米线作谐振梁的谐振式加速度计,采用了双谐振梁的差分结构,利用混频检测方式进行谐振梁的激振和拾振。实现了超高灵敏度加速度检测。使用COMSOL Multiphysics软件建立加速度计结构原型,仿真得到谐振梁的谐振频率分别为1926.480 kHz和1926.499 kHz;在±5 gn的量程范围内,单根梁的检测灵敏度为40.218 kHz/gn,差分检测灵敏度达到80.437 kHz/gn;分析了加速度计的温度特性,差分输出模式有效抑制加速度计的零点漂移,灵敏度随温度变化为2.424 Hz/(gn·K^(-1))。Aiming at problem of low sensitivity of resonant accelerometers,a resonant accelerometer based on ZnO nanowires as resonant beam prepared by chemical vapor deposition(CVD)method is designed.It adopts the differential structure of double resonant beams,uses the frequency mixing detection method to excite and pick up the resonant beams,and realizes ultra-high sensitivity acceleration detection.Build the prototype of the accelerometer structure by using COMSOL Multiphysics,resonant frequencies of the resonant beam are 1926.480 kHz and 1926.499 kHz,respectively,obtained by simulation.Within the range of±5 gn,the detection sensitivity of a single beam is 40.218 kHz/gn,and the differential detection sensitivity reaches 80.437 kHz/gn.The temperature characteristics of the accelerometer are analyzed.The differential output mode effectively suppresses the zero drift of the accelerometer.The sensitivity change with temperature is 2.424 Hz/(gn·K-1).

关 键 词：ZNO纳米线 纳米谐振梁 混频检测 加速度计 高灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]