深紫外飞秒激光脉宽测量  

Pulse duration measurement of deep ultraviolet femtosecond laser

作　　者：张艳琳 游利兵 王宏伟 王琪 胡泽雄 范军 方晓东[1,2] ZHANG Yanlin;YOU Libing;WANG Hongwei;WANG Qi;HU Zexiong;FAN Jun;FANG Xiaodong(Anhui Provincial Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics and Fine Mechanics,HFIPS,Chinese Academy of Sciences,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China;College of New Materials and New Energies,Shenzhen Technology University,Shenzhen 518118,China;School of Electronic and Applied Physics,Hefei University of Technology,Hefei 230009,China;Shenzhen Shengfang Technology Limited Company,Shenzhen 518173,China)

机构地区：[1]中国科学院合肥物质科学研究院安徽光学精密机械研究所,安徽省光子器件与材料重点实验室,安徽合肥230031 [2]中国科学技术大学,安徽合肥230026 [3]深圳技术大学新材料与新能源学院,广东深圳518118 [4]合肥工业大学电子科学与应用物理学院,安徽合肥230009 [5]深圳盛方科技有限公司,广东深圳518173

出　　处：《量子电子学报》2023年第4期469-475,共7页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金(41627803);安徽省重点研究和开发计划项目(1804a0802219);深圳市科技计划项目(KQTD20170331115422184);中国科学院核心关键技术攻关项目(ZKYXG-2018-04)。

摘　　要：为准确测量193 nm深紫外飞秒激光的脉冲宽度,基于氟化钙的双光子荧光效应,设计并搭建了用于紫外飞秒激光脉冲的脉宽测量系统。双光子荧光信号强度与入射激光光强的平方依赖关系证明了获得双光子荧光信号的可靠性。利用插入法进行了CCD探测系统的数值标定,获得单像素对应的时间尺度为7.35 fs。单脉冲测量下,得到193 nm深紫外飞秒激光的脉宽为476.1 fs,与利用光谱法进行测量计算得到的结果基本吻合。In order to accurately measure the pulse width of 193 nm deep ultraviolet femtosecond laser,a pulse width measurement system was designed and built based on the two-photon fluorescence effect of calcium fluoride.The square dependent relationship of the two-photon fluorescence signal on incident laser intensity confirms the reliability of the two-photon fluorescence signal.The numerical calibration of the CCD detection system is carried out using insertion method,and the obtained time scale correspongding to a single pixel is 7.35 fs.In single-shot pulse measurement,the pulse width of 193 nm deep ultraviolet femtosecond laser is measured to be 476.1 fs,which is basically consistent with the result obtained through measurement and calculation using spectroscopy.

关 键 词：激光技术 脉宽测量 深紫外飞秒激光 双光子荧光 

分 类 号：TN247[电子电信—物理电子学]