微透镜阵列扫描成像系统的衍射分析与研究  

Diffraction analysis and research of microlens array scanning imaging system

作　　者：陈卉 CHEN Hui(The 11th Research Institute of CETC,Beijing 100015,China)

机构地区：[1]中国电子科技集团第十一研究所,北京100015

出　　处：《激光与红外》2023年第7期1087-1094,共8页Laser & Infrared

摘　　要：微透镜阵列是微光学元件典型器件之一,广泛的应用于光束整形、精密测量、光学成像等场景。本文研究了微透镜阵列扫描成像系统的工作机理,并重点分析了影响成像质量的光场衍射效应和杂散光串扰,完成了微透镜阵列扫描成像系统衍射效应的推导与仿真,揭示了衍射效应与焦距及子单元孔径之间的关系,为微透镜阵列扫描成像系统的实际应用提供了导向,并为微透镜阵列的光束控制应用提供理论支撑,为微透镜阵列的建模、设计等提供依据。Microlens array is one of the typical devices of micro-optical components,which is widely used in beam shaping,precision measurement,optical imaging and other scenarios.In this paper,the working mechanism of the microlens array scanning imaging system is studied,and the light field diffraction effect and stray light crosstalk that affect the imaging effect,are analyzed with emphasis.The derivation and simulation of the diffraction effect of the microlens array scanning imaging system is completed,and the relationship between diffraction effect and the focal length and subunit aperture is revealed,which provides guidance for the practical application of the microlens array scanning imaging system,theoretical support for the beam control application of the microlens array,and a basis for modeling and design of the microlens array.

关 键 词：微光学 微透镜阵列 衍射效应 扫描成像 杂散光 

分 类 号：O436[机械工程—光学工程]