LPCVD+磷扩二合一设备的可行性研究  

Feasibility Study of LPCVD+ Phosphorus Expansion Two-in-one Equipment

作　　者：侯净雷 张华灿 张黎静 赵爱爽 郑伟 HOU Jinglei;ZHANG Huacan;ZHANG Lijing;ZHAO Aishuang;ZHENG Wei

机构地区：[1]晶澳太阳能有限公司,河北邢台055550

出　　处：《今日自动化》2023年第4期31-34,共4页Automation Today

摘　　要：文章首先介绍了在光伏电池生产过程中,LPCVD和磷扩散设备的结构和工艺原理,阐述了LPCVD和磷扩散工艺在TOPCon电池生产中,制备纳米级隧穿氧化层和磷掺杂多晶硅层的重要核心作用。然后介绍了TOPCon核心电池结构—隧穿氧化层和磷掺杂多晶硅层的两种主流量产工艺路线(LPCVD路线和PE-poly路线),并重点阐述了LPCVD和PE-poly两种工艺路线的优劣势分析,系统说明了LPCVD目前存在关键瓶颈难题以及解决方案,随着LPCVD工艺路线的行业难题得到解决,“LPCVD+磷扩散二合一设备”应运而生,此二合一设备将会在TOPCon电池产业化制造领域得到较好的提升及应用。In this paper,the structure and process principle of LPCVD(low pressure chemical vapor deposition)and phosphorus diffusion equipment in the production of photovoltaic cells are introduced firstly,and the important core role of LPCVD and phosphorus diffusion process in the preparation of nanoscale tunneling oxide layer and phosphorus doped polycrystalline silicon layer in the production of TOPCon cells is described.Then,it introduces TOPCon core cell structure--two main flow production process routes(LPCVD route and PE-poly route)of tunneling oxide layer and phosphate-doped polysilicon layer,and focuses on the analysis of advantages and disadvantages of LPCVD and PE-poly two process routes.The system explains the key bottleneck problems and solutions of LPCVD at present.With the solution of the industry problems of the LPCVD process route,"LPCVD+phosphorus diffusion two-in-one equipment"came into being.This two-in-one equipment will be better promoted and applied in the field of TOPCon battery industrial manufacturing.

关 键 词：LPCVD设备 磷扩散设备 掩膜 异形炉体 

分 类 号：TH12[机械工程—机械设计及理论]