多场耦合绝对式时栅角位移传感器误差分析及优化  

Error analysis and optimization of multi-field coupling absolute time-grating angular displacement sensors

作　　者：陈鸿友 张桁潇 余海游 陈自然[1,2,3] CHEN Hongyou;ZHANG Hengxiao;YU Haiyou;CHEN Ziran(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing University of Technology,Chongqing 400054,China;CCTEG Chongqing Research Institute,Chongqing 400039,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]时栅传感及先进检测技术重庆市重点实验室,重庆400054 [3]中煤科工集团重庆研究院有限公司,重庆400039

出　　处：《重庆理工大学学报（自然科学）》2023年第7期120-128,共9页Journal of Chongqing University of Technology：Natural Science

基　　金：国家自然科学基金项目(5217549);重庆市自然科学基金面上项目(cstc2020 jcyj-msxmX0917);重庆理工大学研究生教育高质量发展计划项目(gzlcx20222039);重庆市科研创新项目(CYS22655)。

摘　　要：针对传统绝对式角位移传感器过度依赖编码技术以及超精密加工方法的问题,利用“定位+测量”的组合方式,提出一种多圈结构的多个物理场共同耦合作用的角位移传感器。通过理论误差推导、对极内仿真误差分析以及实验误差研究对该传感器进行误差特性分析,提出传感器结构优化方案;通过PCB工艺制作传感器优化前后2套样机并进行实验,结果表明:优化后的传感器系统测量误差由±16.5″降低至±6.2″。该结构可充分发挥磁场式时栅抗干扰能力强和电场式时栅精度高的优势,具有重要应用价值。该传感器通过测量时间量实现对空间量的测量,性能优良,特别适合在复杂工况中使用。In response to the problem that traditional absolute angular displacement sensors overly rely on encoding technology and ultra-precision machining methods,this paper proposes a multi-loop angular displacement sensor with coupled multiple physical fields by using a combination of“positioning+measurement”.At the same time,the error characteristics of the sensor are analyzed through theoretical error derivation,intra-pole simulation error analysis and experimental error research.The sensor structure optimization plan is also proposed.Two sets of prototypes before and after the sensor optimization are made by using PCB technology and the experimental research is carried out.The results show that the measurement accuracy of the optimized sensor system improves from±16.5″to±6.2″.This structure can fully utilize the advantages of the strong anti-interference ability of time-grating magnetic field and high accuracy of time-grating electric field,and has important application value.The sensor achieves the measurement of spatial quantities by measuring time quantities,and has excellent performance,especially suitable for use under complex working conditions.

关 键 词：时栅角位移传感器 多场耦合 误差分析 结构优化 

分 类 号：TH7[机械工程—仪器科学与技术]