4~6 GHz高谐波抑制MEMS环行耦合器  

4-6 GHz High Harmonic Suppression MEMS Circular-Coupler

作　　者：翟晓飞 汪蔚[1] 周嘉 武亚宵 高纬钊 Zhai Xiaofei;Wang Wei;Zhou Jia;Wu Yaxiao;Gao Weizhao(The 13th Research Institute,China Electronics Technology Group Corporation,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2023年第6期902-907,共6页Micronanoelectronic Technology

摘　　要：目前通信系统向小型化、高性能、集成化的趋势快速发展,对射频(RF)组件的体积和电性能提出苛刻要求。而环行器、耦合器等作为射频最前端的无源元件,直接影响射频组件的体积和电性能。利用微电子机械系统(MEMS)技术设计了一款环形耦合器,一方面将环行器和耦合器进行无源集成,具有内部匹配良好、易于装配、尺寸小等优势;另一方面发射损耗的主要谐波被抑制。环行耦合器的工作频率是4~6 GHz,尺寸为8 mm×10 mm×2.5 mm,带内插入损耗小于0.85 dB,带内隔离度大于17 dB,带内电压驻波比(VSWR)小于1.35,耦合度为(22±0.5)dB,8~8.5 GHz的抑制度大于9 dB,8.5~18 GHz的抑制度大于20 dB。At present,the communication system develops rapidly toward the trend of miniaturization,high performance and integration,which puts forward strict requirements for the volume and electrical performances of radio frequency(RF)modules.As passive components at the most front-end of RF,the circulator and coupler directly affect the volume and electrical performance of RF modules.A circular-coupler was designed using the micro-electromechanical system(MEMS)technology.On one hand,the circular and the coupler were passively integrated.The component has advantages of good inner match,easy assembling,small size,etc.On the other hand,the main harmonics of the transmitting loss were suppressed.The operating frequency of the circular-coupler is 4-6 GHz,the size is 8 mm×10 mm×2.5 mm,the in-band insertion loss is less than 0.85 dB,the in-band isolation is greater than 17 dB,the inband voltage standing wave ratio(VSWR)is less than 1.35,the coupling degree is(22±0.5)dB,the suppression degree is greater than 9 dB at 8-8.5 GHz,and the suppression degree is greater than 20 dB at 8.5-18 GHz.

关 键 词：微电子机械系统(MEMS) 环形器 耦合器 集成无源元件 谐波抑制 

分 类 号：TN751.1[电子电信—电路与系统] TH703[机械工程—仪器科学与技术]