大气压氩气微等离子体射流加工聚合物薄膜  

Polymer Film Processing by Atmospheric Pressure Argon Micro-Plasma Jet

作　　者：陈雄 王兴权[1] 张彬祥 袁林森 余洁 王娜 欧阳凯祥 CHEN Xiong;WANG Xingquan;ZHANG Binxiang;YUAN Linsen;YU jie;WANG Na;OUYANG Kaixiang(Institute of Low Temperature Plasma Technology,School of Physics and Electronic Information,Gannan University of Normal,Ganzhou 341000,China;The 722 Research Institute of CSSC,Wuhan 430205,China)

机构地区：[1]赣南师范大学物理与电子信息学院低温等离子体技术研究所,赣州341000 [2]中国船舶集团有限公司第七二二研究所,武汉430205

出　　处：《真空科学与技术学报》2023年第7期618-624,共7页Chinese Journal of Vacuum Science and Technology

基　　金：江西省自然科学基金项目(20181BAB201018);江西省学位与研究生教育教学改革研究项目(JXYJG-2022-180)。

摘　　要：为研究实验衬底电导率对于大气压微等离子体射流特性的影响,在处理聚合物薄膜表面的过程中,铜片、硅片、石英玻璃片分别作为实验衬底,对针-环型射流装置产生的微等离子体射流特性进行了实验分析。电特性结果表明,三种条件下的放电电流波形特点相同,仅存在数值上的差异,放电功率均随电压增大而增大,在相同条件下使用铜片时射流放电强度最强。对等离子体射流发射光谱进行采集,并计算三者气体温度和电子温度,结果表明三种条件下的射流气体温度范围在310~365 K,均接近室温,电子温度分别为2118、1958和1380 K,使用铜片时射流电子温度最高,可认为其具有更多的高能电子和活性物质。利用射流对聚合物薄膜的处理效率对结论进一步验证,三种条件下射流分别处理PET薄膜表面15 s,表面静态接触角从初始78.1°分别降至22.2°、26.3°、28.3°,可见使用高电导率的衬底有助于提高微等离子体射流的处理效率。这些研究结果对大气压低温等离子体射流加工聚合物薄膜工艺具有重要意义。In order to investigate the effect of substrate conductivity on the characteristics of atmospheric pressure micro-plasma jet,in the process of polymer film processing,we analyzed the plasma jet with three kinds of substrates,copper,silicon,and glass through experiments,generated by a ring-rod jet device.The characteristics of the discharge waveform under the three different substrate conditions were similar,but there were numerical differences in the root mean square value of current and the dissipated power,and the substrate with higher conductivity enhanced the discharge intensity of the plasma jet.The gas temperature and the electron temperature were calculated by optical emission spectra scanned in the range from 200 nm to 850 nm.Under three conditions,the gas temperature ranged from 310 to 365 K,and the electron temperature was 2118 K,1958 K and 1380 K,separately.With copper substrate,the emission spectral intensity of the jet was the strongest and had the highest electron temperature,which could be considered to have more high-energy electrons and active species.The PET films were treated with the jets under three conditions for 15 s.The water contact angle decreased from the initial 78.1°to 22.2°,26.3°,and 28.3°,respectively.It can be seen that the atmospheric pressure micro-plasma jet with the substrate of higher conductivity enhances processing efficiency.These results have important implications for the process of atmospheric pressure micro-plasma jet processing of polymer films.

关 键 词：大气压等离子体 针-环型射流 实验衬底 聚合物薄膜 

分 类 号：O53[理学—等离子体物理]