基于法布里-珀罗腔产生飞秒激光脉冲串在硅表面诱导高质量亚波长周期条纹(特邀)  

High Quality Near-subwavelength Ripples on Si Induced by Femtosecond Pulse Train Output from Fabry-Perot Cavity(Invited)

作　　者：许宇锋 张羽婵 蒋其麟 沈辉辉 贾天卿[1] XU Yufeng;ZHANG Yuchan;JIANG Qilin;SHEN Huihui;JIA Tianqing(State Key Laboratory of Precision Spectral Science and Technology,East China Normal University,Shanghai 200241,China)

机构地区：[1]华东师范大学精密光谱科学与技术国家重点实验室,上海200241

出　　处：《光子学报》2023年第7期1-12,共12页Acta Photonica Sinica

基　　金：国家自然科学基金(No.12074123)。

摘　　要：为了制备高质量表面周期结构,利用法布里-珀罗腔对飞秒激光进行时域整形,输出子脉冲间隔在1~300 ps内灵活可调的飞秒激光脉冲串,在硅表面诱导亚波长周期条纹。实验结果显示,利用飞秒激光脉冲串诱导得到的亚波长周期条纹明显优于原始高斯光诱导的亚波长周期条纹。利用子脉冲间隔为100 ps的脉冲串诱导的亚波长条纹最佳,条纹周期为1008 nm,结构取向角为2.8°,边缘粗糙度为3.9 nm,可达到光刻工艺的标准。Laser-Induced Periodic Surface Structures(LIPSS)can be widely used in different processing fields,involving various materials such as semiconductors,dielectrics,metals,polymers.They have great potential in micro-nano processing.LIPSS are divided into two categories:Near-Subwavelength Ripples(NSRs)with periodΛlarger thanλ/2 and Deep-Subwavelength Ripples(DSRs)with periodΛsmaller thanλ/2,whereλis the incident laser wavelength.LIPSS can improve the surface properties of materials and can be used for modulation of the surface wettability of materials;enhanced surface Raman scattering;surface coloring;birefringence and optical storage,etc.They can be widely applied in many fields such as data storage,industrial manufacturing,and biomedicine.The formation of LIPSS is a complex process.Within a few nanoseconds after the femtosecond laser irradiation on the material surface,a series of ultrafast processes such as carrier excitation,carrier heating,lattice heating,plasma ejection,and nanoparticle ejection occur,which greatly increases the difficulty of processing regular NSRs.Therefore,how to improve the quality of NSRs has been an important research direction for femtosecond laser processing.Pulse shaping can regulate the distribution of laser energy in the time domain,which can then regulate the ultrafast process of laser-matter interaction.In order to fabricate high-quality LIPSS,we built a Fabry-Perot(F-P)cavity femtosecond laser pulse train processing system to conduct femtosecond laser time-domain shaping.The central wavelength of the laser is 1030 nm,and we output femtosecond laser pulse train with flexible sub-pulse intervals in the range of 1~300 ps to fabricate NSRs on the silicon surface.The laser scanning velocity is altered by moving the sample through a 3D electronically controlled translation stage.By adjusting the distance between beam splitter and zero-degree mirror,we changed the sub-pulse interval and investigated NSRs induced by pulse trains with different sub-pulse intervals.After the samples wer

关 键 词：激光加工 激光诱导表面周期结构 亚波长周期条纹 法布里-珀罗腔 飞秒激光脉冲串 硅 

分 类 号：TN244[电子电信—物理电子学]