激光诱导薄膜材料二维图案化纳米加工技术(特邀)  

Laser-induced Two-dimensional Surface Nanopatterning on Film Materials(Invited)

作　　者：黄佳旭 李峻 邱佩 徐少林 HUANG Jiaxu;LI Jun;QIU Pei;XU Shaolin(Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen 518055,China)

机构地区：[1]南方科技大学机械与能源工程系,深圳518055

出　　处：《光子学报》2023年第7期13-20,共8页Acta Photonica Sinica

基　　金：深圳市科技项目(Nos.JCYJ20220818100408019,JSGG20210802154007021,KQTD20170810110250357)。

摘　　要：激光诱导周期性表面结构(Laser-Induced Periodic Surface Structures,LIPSS)是一种在激光辐照下自发生成的超衍射极限结构,但其结构类型较为单一。提出了一种新型的二维图案化激光纳米加工方法,通过同时利用激光诱导的热效应及表面等离激元干涉,在正交的两个方向上分别形成褶皱和LIPSS两种周期性结构。这种方法仅通过单步辐照就能在薄膜材料表面生成二维褶皱LIPSS,从而丰富LIPSS的结构类型。同时,通过调整加工材料的膜厚或基底,以及改变入射激光波长或角度,可以分别调制二维纳米结构在两个正交方向上的周期。此外,通过激光偏振也可以调控该结构的取向。该方法能够进一步拓宽基于LIPSS的可加工表面纳米结构的种类及应用。Laser-Induced Periodic Surface Structures(LIPSS)have been extensively studied as grating structures that form beyond the diffraction limit under laser irradiation over a large area.However,most LIPSS are essentially one-dimensional(1D)gratings,and this limited range of structural types in LIPSS hampers their widespread applications.To overcome this challenge,our study proposes a novel maskless two-dimensional(2D)laser nanopatterning method that combines the utilization of laser-induced thermal deformation effects and laser-Surface-Plasmon-Polaritons(SPPs)interference.By harnessing these two effects simultaneously,we can create two distinct periodic structures,namely wrinkles and LIPSS,in orthogonal directions.This innovative approach enables the generation of 2D wrinkled LIPSS on thin-film materials through a single-step laser irradiation process.Moreover,we have made significant advancements in the spatial modulation of the irradiated femtosecond laser,achieving a line shape with a length of 8 mm and a width of 7.78μm.This spatial modulation facilitates efficient nanopatterning of these 2D LIPSS on a millimeter scale within seconds.These breakthroughs greatly expand the range of achievable structural types with LIPSS,making them more suitable for mass micro/nano fabrication.Our investigation focuses on the formation of wrinkles and LIPSS on Ge2Sb2Te5(GST)thin-film materials,with an emphasis on laser-induced thermal accumulation,thermal deformation,and laser-SPPs interference.During the laser-induced thermal deformation,wrinkles spontaneously generate with a period of approximately 270 nm on a 50-nm-thick GST film over a silicon substrate.Importantly,these wrinkles maintain their stability in terms of their periods under laser irradiation with varying laser pulse energies.Furthermore,their periods can also be accurately controlled and predicted through a thermal deformation model,which has been validated on GST thin films with different thicknesses and substrate materials.Similarly,another periodic structure,nam

关 键 词：超快激光 激光诱导周期性表面结构 激光诱导褶皱 薄膜材料 二维纳米结构 飞秒激光 

分 类 号：TN249[电子电信—物理电子学] TN241