全反射X射线荧光分析技术及仪器研究进展  

Research Progress of Total Reflection X-ray Fluorescence Analysis Technology and Instrument

作　　者：王星宇 黑大千 张新磊[2] WANG Xingyu;HEI Daqian;ZHANG Xinlei(School of Nuclear Science and Technology,Lanzhou University,Lanzhou,Gansu 731000,China;School of Materials Science and Technology,Nanjing University of Aeronautics and Astronautics,Nanjing,Jiangsu 210000,China)

机构地区：[1]兰州大学核科学与技术学院,兰州731000 [2]南京航空航天大学材料科学与技术学院,南京210000

出　　处：《中国无机分析化学》2023年第9期930-938,共9页Chinese Journal of Inorganic Analytical Chemistry

基　　金：国家重大科学仪器设备开发专项(2013YQ040861)。

摘　　要：全反射X射线荧光分析技术(Total-Reflection X-Ray Fluorescence Analysis,TXRF),是一种多元素、高灵敏分析技术,具有样品需求量小、非破坏性、量化方法简单、检测限低、多元素同时分析等特点,适用于痕量元素快速分析,其技术与分析仪器广泛应用于环境、材料、生物、半导体材料等领域,近年来成了X射线荧光光谱学领域的研究热点之一。对全反射X射线荧光分析的技术背景、技术特点、全反射X射线荧光分析物理原理、全反射X射线荧光分析仪器关键部件的发展与新型产品进行了综述,对全反射X射线荧光分析仪器的国内外发展现状进行了梳理和总结,从关键部件、分析方法等方面出发对全反射X射线分析技术与仪器的新应用领域,新型X射线光管与新型SDD探测器的诞生对分析仪器性能的提升以及新定量分析方法对分析精度的影响进行了展望。Total reflection X-ray fluorescence analysis(TXRF)is a multi-element and highly sensitive analysis technique,which has the advantages of small sample demand,non-destructive,simple quantitative method,low detection limit and multi-elements simultaneous analysis.It is suitable for rapid analysis of trace elements.Its technology and analytical instruments are widely used in the fields of environment,materials,biology,semiconductor materials and so on.In recent years,it has become one of the research hotspots in the field of X-ray fluorescence spectroscopy.This paper introduced an overview of the technical background,characteristics,physical principles,key components and new products of total reflection X-ray fluorescence analysis instrument.The development status of total reflection X-ray fluorescence analysis instruments at home and abroad was combed and summarized.From the aspects of key components,analytical methods and other aspects,the new application fields of total reflection X-ray analysis technology and instruments,the emergence of new X-ray tubes and new SDD detectors to improve the performance of analytical instruments,and the influence of new quantitative analysis methods on analytical accuracy were prospected.

关 键 词：全反射X射线荧光分析 TXRF 分析仪器 

分 类 号：O657.34[理学—分析化学] TH744.15[理学—化学]